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    Journals >Optics and Precision Engineering >Volume 14 >Issue 3 >Page 422 > Article
    • Optics and Precision Engineering
    • Vol. 14, Issue 3, 422 (2006)
    Study on neural network PID control for micro-displacement stage of Scanning Tunneling Microscope
    1,2, 1, 1, 1, and 1
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  • 1[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on neural network PID control for micro-displacement stage of Scanning Tunneling Microscope[J]. Optics and Precision Engineering, 2006, 14(3): 422 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on neural network PID control for micro-displacement stage of Scanning Tunneling Microscope[J]. Optics and Precision Engineering, 2006, 14(3): 422
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