Patterning process of SiO2 film and fabrication of Si V-groove

Jun’e Liu; Zhongda Guo; Weiguo Liu; Huan Liu

doi:10.3788/COL201008s1.0216

Journals >Chinese Optics Letters >Volume 8 >Issue s1 >Page 216 > Article

Chinese Optics Letters
Vol. 8, Issue s1, 216 (2010)

Patterning process of SiO2 film and fabrication of Si V-groove

Jun’e Liu, Zhongda Guo, Weiguo Liu, and Huan Liu

Author Affiliations

Shaanxi Province Thin Film Technology and Optical Test Open Key Laboratory, Xi’an Technological University, Xi’an 710032, China

show less

DOI: 10.3788/COL201008s1.0216 Cite this Article Set citation alerts

Jun’e Liu, Zhongda Guo, Weiguo Liu, Huan Liu. Patterning process of SiO2 film and fabrication of Si V-groove[J]. Chinese Optics Letters, 2010, 8(s1): 216 Copy Citation Text

show less

References

[1] Y. Liu, C. Chen, G. Ding, and Y. Cui, J. Tianjin Univ. (in Chinese) 36, 409 (2003).

[2] Y. Lei, Infrared and Laser Engineering (in Chinese) 31, 447 (2002).

[3] C. Cai, R. Ma, W. Liu, H. Liu, and S. Zhou, Semicond. Optoelectron. (in Chinese) 30, 211 (2009).

[4] G. Shen, C. Wu, P. Yao, X. Yang, X. Liu, P. Lu, and S. Gao, Chinese J. Sensors and Actuators (in Chinese)(2) 140 (2001).

[5] C. Yang, Semicond. Optoelectron. (in Chinese) 21, 73 (2000).

Jun’e Liu, Zhongda Guo, Weiguo Liu, Huan Liu. Patterning process of SiO2 film and fabrication of Si V-groove[J]. Chinese Optics Letters, 2010, 8(s1): 216

Download Citation

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information