[1] XingC Q. Research on non-contact vibration measurement technology based on optical fiber interferometer［D］. Dalian: Dalian University of Technology, 2013: 1-3.

[2] Li N, Han X J, Li J H. Ground testing method for spacecraft micro-vibration signals［J］. Spacecraft Environment Engineering, 2011, 28(1): 67-71.

[3] Zhang H Y, Zhao C M, Jiang Q J, et al. Laser detection on micro-doppler effect in coherent ladar［J］. Chinese Journal of Lasers, 2008, 35(12): 1981-1985.

[4] Hou W M, Zhang Y B, Le Y F, et al. Elimination of the nonlinearity of heterodyne displacement interferometers［J］. Chinese Journal of Lasers, 2012, 39(9): 0908006.

[5] Zeng W, Chen P F, Zhu M Z. Review and outlook on laser vibration measurement［J］. OME Information, 2005(5): 16-19.

[6] Li L Y, Wu B, Yuan Y G, et al. Research on nonlinear error compensation method for single-frequency laser interferometer［J］. Acta Optica Sinica, 2011, 31(7): 0726003.

[7] Le Y F, Ju A S. Analysis and measurement of the nonlinear errors in heterodyne interferometers［J］. Laser & Optoelectronics Progress, 2016, 53(5): 051203.

[8] Deng Y L, Li X J, Geng Y F, et al. Influence of nonpolarizing beam splitters on nonlinear error in heterodyne interferometers［J］. Acta Optica Sinica, 2012, 32(11): 1112008.

[9] Heydemann P L. Determination and correction of quadrature fringe measurement errors in interferometers［J］. Applied Optics, 1981, 20(19): 3382-3384.

[10] Kim J A, Kim J W, Kang C S, et al. Technical design note: a digital signal processing module for real-time compensation of nonlinearity in a homodyne interferometer using a field-programmable gate array［J］. Measurement Science and Technology, 2009, 20(1): 017003.

[11] Li Z, Herrmann K, Pohlenz F. A neural network approach to correcting nonlinearity in optical interferometers［J］. Measurement Science and Technology, 2003, 14(3): 376-381.

[12] Poar T, Moina J. Enhanced ellipse fitting in a two-detector homodyne quadrature laser interferometer［J］. Measurement Science and Technology, 2011, 22(8): 085301.

[13] Kning R, Wimmer G, Witkovsk V. Ellipse fitting by nonlinear constraints to demodulate quadrature homodyne interferometer signals and to determine the statistical uncertainty of the interferometric phase［J］. Measurement Science and Technology, 2014, 25(11): 115001.

[14] Eom T B, Kim J Y, Jeong K. The dynamic compensation of nonlinearity in a homodyne laser interferometer［J］. Measurement Science and Technology, 2001, 12(10): 1734-1738.

[15] Dai G L, Pohlenz F, Danzebrink H, et al. Improving the performance of interferometers in metrological scanning probe microscopes［J］. Measurement Science and Technology, 2004, 15(2): 444-450.

[16] Hu P C, Zhu J H, Guo X B, et al. Compensation for the variable cyclic error in homodyne laser interferometers［J］. Sensors, 2015, 15(2): 3090-3106.

[17] Keem T, Gonda S, Misumi I, et al. Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems［J］. Applied Optics, 2004, 43(12): 2443-2448.

[18] Keem T, Gonda S, Misumi I, et al. Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system［J］. Applied Optics, 2005, 44(17): 3492-3498.

[19] Ahn J, Kim J A, Kang C S, et al. A passive method to compensate nonlinearity in a homodyne interferometer［J］. Optics Express, 2009, 17(25): 23299-23308.

[20] Guo X B. Research on key technology of homodyne laser interference vibration measurement［D］. Harbin: Harbin Institute of Technology, 2015: 21-24.

[21] Hu P C, Zhu J H, Zhai X Y, et al. DC-offset-free homodyne interferometer and its nonlinearity compensation［J］. Optics Express, 2015, 23(7): 8399-8408.

[22] Hu P C, Pollinger F, Meiners-Hagen K, et al. Fine correction of nonlinearity in homodyne interferometry［J］. Proceedings of SPIE, 2010, 7544: 75444E.