Compact High Uniformity Silicon Waveguide Arrayed Waveguide Grating

Zhihua Feng; Shuo Yuan; Yishu Chen; Haipeng Liu; Qunyu Bi; Fuling Zhang; Jijun Feng

doi:10.3788/CJL230484

[1] Wang L L, Zhang J S, An J M et al. Compact and low loss coarse wavelength division demultiplexer chip[J]. Acta Optica Sinica, 41, 0923001(2021).

[2] Marom D M, Blau M. Switching solutions for WDM-SDM optical networks[J]. IEEE Communications Magazine, 53, 60-68(2015).

[3] Ismail N, Sun F, Sengo G et al. Improved arrayed-waveguide-grating layout avoiding systematic phase errors[J]. Optics Express, 19, 8781-8794(2011).

[4] Obaid H M, Shahid H. Performance evaluation of hybrid optical amplifiers for a 100×10 Gbps DWDM system with ultrasmall channel spacing[J]. Optik, 200, 163404(2020).

[5] Blau M, Marom D M. Spatial aperture-sampled mode multiplexer extended to higher mode count fibers[J]. Journal of Lightwave Technology, 33, 4805-4814(2015).

[6] Chen Y H, Tang W J. Reconfigurable asymmetric optical burst switching for concurrent DWDM multimode switching: architecture and research directions[J]. IEEE Communications Magazine, 48, 57-65(2010).

[7] Stanton E J, Spott A, Davenport M L et al. Low-loss arrayed waveguide grating at 760 nm[J]. Optics Letters, 41, 1785-1788(2016).

[8] Fotiadis K, Pitris S, Moralis-Pegios M et al. Silicon photonic 16×16 cyclic AWGR for DWDM O-band interconnects[J]. IEEE Photonics Technology Letters, 32, 1233-1236(2020).

[9] Yuan R. Arrayed waveguide grating component and its applications[J]. Optical Communication Technology, 34, 1-5(2010).

[10] Kamei S, Ishii M, Itoh M et al. 64×64-channel uniform-loss and cyclic-frequency arrayed-waveguide grating router module[J]. Electronics Letters, 39, 83(2003).

[11] Zhang J S, An J M, Sun B L et al. Fabrication of silica based silicon 20 channel cyclic arrayed waveguide grating[J]. Acta Photonica Sinica, 51, 0623003(2022).

[12] Ran N, Chen X Y, Wang Z K et al. Optimization and experiments of on-chip silicon nitride grating couplers[J]. Acta Optica Sinica, 43, 0113002(2023).

[13] Smit M K. New focusing and dispersive planar component based on an optical phased array[J]. Electronics Letters, 24, 385(1988).

[14] Doerr C R, Zhang L M, Winzer P J. Monolithic InP multiwavelength coherent receiver using a chirped arrayed waveguide grating[J]. Journal of Lightwave Technology, 29, 536-541(2011).

[15] Takada K, Yamada H, Inoue Y. Optical low coherence method for characterizing silica-based arrayed-waveguide grating multiplexers[J]. Journal of Lightwave Technology, 14, 1677-1689(1996).

[16] Lu S, Yang C X, Yan Y B et al. Design and fabrication of a polymeric flat focal field arrayed waveguide grating[J]. Optics Express, 13, 9982-9994(2005).

[17] Li C Y, An J M, Wang J Q et al. The 8×10 GHz receiver optical subassembly based on silica hybrid integration technology for data center interconnection[J]. Chinese Physics Letters, 34, 104202(2017).

[18] Min Y H, Lee M H, Ju J J et al. Polymeric 16×16 arrayed-waveguide grating router using fluorinated polyethers operating around 1550 nm[J]. IEEE Journal of Selected Topics in Quantum Electronics, 7, 806-811(2001).

[19] Wang J, Sheng Z, Li L et al. Low-loss and low-crosstalk 8×8 silicon nanowire AWG routers fabricated with CMOS technology[J]. Optics Express, 22, 9395-9403(2014).

[20] Park J, Joo J, Kwack M J et al. Three-dimensional wavelength-division multiplexing interconnects based on a low-loss SixNy arrayed waveguide grating[J]. Optics Express, 29, 35261-35270(2021).

[21] Zou J, Jiang X X, Xia X et al. Ultra-compact birefringence-compensated arrayed waveguide grating triplexer based on silicon-on-insulator[J]. Journal of Lightwave Technology, 31, 1935-1940(2013).

[22] Liu D J, Zhao W K, Zhang L et al. High performance passive silicon optical waveguide devices: development and challenges[J]. Acta Optica Sinica, 42, 1713001(2022).

[23] Sun D X, Zhang D L, Bi F et al. Application of silicon-based microring resonant cavity in integrated optical gyroscope sensitive unit[J]. Laser & Optoelectronics Progress, 59, 1313001(2022).

[24] Liu H P, Feng J J, Ge J M et al. Tilted nano-grating based ultra-compact broadband polarizing beam splitter for silicon photonics[J]. Nanomaterials, 11, 2645(2021).

[25] Nishi H, Tsuchizawa T, Kou R et al. Monolithic integration of a silica AWG and Ge photodiodes on Si photonic platform for one-chip WDM receiver[J]. Optics Express, 20, 9312-9321(2012).

[26] Yuan S, Feng J J, Yu Z H et al. Silicon nanowire-assisted high uniform arrayed waveguide grating[J]. Nanomaterials, 13, 182(2022).

[27] Pathak S, Vanslembrouck M, Dumon P et al. Optimized silicon AWG with flattened spectral response using an MMI aperture[J]. Journal of Lightwave Technology, 31, 87-93(2013).

[28] Li H Q, Gao W T, Li E B et al. Investigation of ultrasmall 1×N AWG for SOI-based AWG demodulation integration microsystem[J]. IEEE Photonics Journal, 7, 7802707(2015).

[29] Marz R, Cremer C. On the theory of planar spectrographs[J]. Journal of Lightwave Technology, 10, 2017-2022(1992).

[30] Smit M K, Van Dam C. PHASAR-based WDM-devices: principles, design and applications[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2, 236-250(1996).

[31] Zou J, Ma X, Xia X et al. High resolution and ultra-compact on-chip spectrometer using bidirectional edge-input arrayed waveguide grating[J]. Journal of Lightwave Technology, 38, 4447-4453(2020).

[32] Song G Y, Wang S X, Zou J et al. Silicon-based cyclic arrayed waveguide grating routers with improved loss uniformity[J]. Optics Communications, 427, 628-634(2018).

[33] Lu H C, Wang W S. Cyclic arrayed waveguide grating devices with flat-top passband and uniform spectral response[J]. IEEE Photonics Technology Letters, 20, 3-5(2008).

[34] Liu X T, Feng J J, Wu X Y et al. Silicon waveguide based integrated optical phased array chips (invited)[J]. Acta Photonica Sinica, 49, 1149012(2020).