• Acta Optica Sinica
  • Vol. 40, Issue 12, 1205001 (2020)
Jinlong Zhang1、2、*, Shuaikai Shi1、2, Hongfei Jiao1、2, and Xinbin Cheng1、2
Author Affiliations
  • 1The MOE Key Laboratory of Advanced Micro-Structured Materials, Tongji University, Shanghai 200092, China
  • 2Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China
  • show less
    DOI: 10.3788/AOS202040.1205001 Cite this Article Set citation alerts
    Jinlong Zhang, Shuaikai Shi, Hongfei Jiao, Xinbin Cheng. Analytical Mode Matching in Stacked Subwavelength Gratings[J]. Acta Optica Sinica, 2020, 40(12): 1205001 Copy Citation Text show less
    Stacked grating structure diagrams. (a) Three-dimensional schematic diagram; (b) section diagram
    Fig. 1. Stacked grating structure diagrams. (a) Three-dimensional schematic diagram; (b) section diagram
    Three layers stacked grating section diagram
    Fig. 2. Three layers stacked grating section diagram
    Cross section diagram of double layers grating and calculation errors of diffraction efficiency. (a) Section diagram (Λ=780 nm, s/Λ=0.72,z1=440 nm,z2=370 nm); (b) comparison of diffraction efficiency calculated by rigorous coupled wave analysis and mode analytical method
    Fig. 3. Cross section diagram of double layers grating and calculation errors of diffraction efficiency. (a) Section diagram (Λ=780 nm, s/Λ=0.72,z1=440 nm,z2=370 nm); (b) comparison of diffraction efficiency calculated by rigorous coupled wave analysis and mode analytical method
    Comparison of the amplitude distribution of magnetic field calculated by two methods in the double layers grating. (a) Rigorous coupled wave analysis; (b) mode analytical method
    Fig. 4. Comparison of the amplitude distribution of magnetic field calculated by two methods in the double layers grating. (a) Rigorous coupled wave analysis; (b) mode analytical method
    Amplitude distribution of magnetic field of the first four modes in the double layers grating. (a) Mode 1; (d)mode 2; (c)mode 3; (d)mode 4
    Fig. 5. Amplitude distribution of magnetic field of the first four modes in the double layers grating. (a) Mode 1; (d)mode 2; (c)mode 3; (d)mode 4
    Sectional diagram of three-layer stacked grating and calculation error of diffraction efficiency. (a) Section diagram (Λ=690 nm, s/Λ=0.76, z1=405 nm, z2=662 nm, z3=284 nm); (b) comparison of diffraction efficiency calculated by rigorous coupled wave analysis and mode analytical method
    Fig. 6. Sectional diagram of three-layer stacked grating and calculation error of diffraction efficiency. (a) Section diagram (Λ=690 nm, s/Λ=0.76, z1=405 nm, z2=662 nm, z3=284 nm); (b) comparison of diffraction efficiency calculated by rigorous coupled wave analysis and mode analytical method
    Calculation results of three-layer stacked grating. (a) Amplitude distribution of magnetic field of the first four modes in the grating; (b) perfect cancellation of two modes at the output plane(z=0) leading to high reflectivity
    Fig. 7. Calculation results of three-layer stacked grating. (a) Amplitude distribution of magnetic field of the first four modes in the grating; (b) perfect cancellation of two modes at the output plane(z=0) leading to high reflectivity
    Diffraction orders23410101
    Running time of AMM(100 times) /s4.134.975.5217.21
    Running time of RCWA(once) /s11.87
    Table 1. Running time of different algorithms for the double layers grating calculation
    Diffraction orders234101
    Running time of AMM(100 times) /s7.919.8819.27
    Running time of RCWA(once) /s22.62
    Table 2. Running time of different algorithms for three-layers stacked grating calculation
    Jinlong Zhang, Shuaikai Shi, Hongfei Jiao, Xinbin Cheng. Analytical Mode Matching in Stacked Subwavelength Gratings[J]. Acta Optica Sinica, 2020, 40(12): 1205001
    Download Citation