Author Affiliations
1The MOE Key Laboratory of Advanced Micro-Structured Materials, Tongji University, Shanghai 200092, China2Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, Chinashow less
Fig. 1. Stacked grating structure diagrams. (a) Three-dimensional schematic diagram; (b) section diagram
Fig. 2. Three layers stacked grating section diagram
Fig. 3. Cross section diagram of double layers grating and calculation errors of diffraction efficiency. (a) Section diagram (Λ=780 nm, s/Λ=0.72,z1=440 nm,z2=370 nm); (b) comparison of diffraction efficiency calculated by rigorous coupled wave analysis and mode analytical method
Fig. 4. Comparison of the amplitude distribution of magnetic field calculated by two methods in the double layers grating. (a) Rigorous coupled wave analysis; (b) mode analytical method
Fig. 5. Amplitude distribution of magnetic field of the first four modes in the double layers grating. (a) Mode 1; (d)mode 2; (c)mode 3; (d)mode 4
Fig. 6. Sectional diagram of three-layer stacked grating and calculation error of diffraction efficiency. (a) Section diagram (Λ=690 nm, s/Λ=0.76, z1=405 nm, z2=662 nm, z3=284 nm); (b) comparison of diffraction efficiency calculated by rigorous coupled wave analysis and mode analytical method
Fig. 7. Calculation results of three-layer stacked grating. (a) Amplitude distribution of magnetic field of the first four modes in the grating; (b) perfect cancellation of two modes at the output plane(z=0) leading to high reflectivity
Diffraction orders | 2 | 3 | 4 | 10 | 101 |
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Running time of AMM(100 times) /s | 4.13 | 4.97 | 5.52 | 17.21 | — | Running time of RCWA(once) /s | — | — | — | — | 11.87 |
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Table 1. Running time of different algorithms for the double layers grating calculation
Diffraction orders | 2 | 3 | 4 | 101 |
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Running time of AMM(100 times) /s | 7.91 | 9.88 | 19.27 | — | Running time of RCWA(once) /s | — | — | — | 22.62 |
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Table 2. Running time of different algorithms for three-layers stacked grating calculation