High Power and High Stability 13.5 nm Extreme Ultraviolet Light Source Driven by High‑Order Harmonics

Kui Li; Runyu Meng; Ruixuan Li; Guangyin Zhang; Mingjie Yao; Hao Xu; Yutong Wang; Jie Li; Xiaoshi Zhang; Zhongwei Fan

doi:10.3788/CJL231507

[1] Krause J L, Schafer K J, Kulander K C. High-order harmonic generation from atoms and ions in the high intensity regime[J]. Physical Review Letters, 68, 3535-3538(1992).

[2] Corkum P B. Plasma perspective on strong field multiphoton ionization[J]. Physical Review Letters, 71, 1994-1997(1993).

[3] Popmintchev T, Chen M C, Popmintchev D et al. Bright coherent ultrahigh harmonics in the keV X-ray regime from mid-infrared femtosecond lasers[J]. Science, 336, 1287-1291(2012).

[4] Hädrich S, Rothhardt J, Krebs M et al. Single-pass high harmonic generation at high repetition rate and photon flux[J]. Journal of Physics B: Atomic, Molecular and Optical Physics, 49, 172002(2016).

[5] Schoenlein R, Elsaesser T, Holldack K et al. Recent advances in ultrafast X-ray sources[J]. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 377, 20180384(2019).

[6] Krausz F, Ivanov M. Attosecond physics[J]. Reviews of Modern Physics, 81, 163-234(2009).

[7] Rothhardt J, Tadesse G K, Eschen W et al. Table-top nanoscale coherent imaging with XUV light[J]. Journal of Optics, 20, 113001(2018).

[8] Kraus P M, Zürch M, Cushing S K et al. The ultrafast X-ray spectroscopic revolution in chemical dynamics[J]. Nature Reviews Chemistry, 2, 82-94(2018).

[9] Li J, Lu J, Chew A et al. Attosecond science based on high harmonic generation from gases and solids[J]. Nature Communications, 11, 2748(2020).

[10] Cavalieri A L, Müller N, Uphues T et al. Attosecond spectroscopy in condensed matter[J]. Nature, 449, 1029-1032(2007).

[11] Miao J W, Ishikawa T, Robinson I K et al. Beyond crystallography: diffractive imaging using coherent X-ray light sources[J]. Science, 348, 530-535(2015).

[12] Tschernajew M, Hädrich S, Klas R et al. High repetition rate high harmonic generation with ultra-high photon flux[C], JTh2A.21(2020).

[13] Tadesse G K, Klas R, Demmler S et al. High speed and high resolution table-top nanoscale imaging[J]. Optics Letters, 41, 5170-5173(2016).

[14] Tadesse G K, Eschen W, Klas R et al. Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source[J]. Scientific Reports, 9, 1735(2019).

[15] Tadesse G K, Eschen W, Klas R et al. High resolution XUV Fourier transform holography on a table top[J]. Scientific Reports, 8, 8677(2018).

[16] Kinoshita H, Harada T, Nagata Y et al. Development of EUV mask inspection system using high-order harmonic generation with a femtosecond laser[J]. Japanese Journal of Applied Physics, 53, 086701(2014).

[17] Klas R, Eschen W, Kirsche A et al. Generation of coherent broadband high photon flux continua in the XUV with a sub-two-cycle fiber laser[J]. Optics Express, 28, 6188-6196(2020).

[18] White J, O’Sullivan G, Zakharov S et al. Tin laser-produced plasma source modeling at 13.5 nm for extreme ultraviolet lithography[J]. Applied Physics Letters, 92, 151501(2008).

[19] Benschop J, Banine V, Lok S et al. Extreme ultraviolet lithography: status and prospects[J]. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 26, 2204-2207(2008).

[20] Loetgering L, Witte S, Rothhardt J. Advances in laboratory-scale ptychography using high harmonic sources[J]. Optics Express, 30, 4133-4164(2022).

[21] Gao J X, Lou Z Y, Yang F et al. High-energy high-order harmonic generation around 13 nm wavelength based on hundred-terawatt-level laser system[J]. Acta Optica Sinica, 44, 0214001(2024).

[22] Zhang B, Zheng Q, Zhang W Y et al. Two-color free electron laser based on echo-enabled harmonic generation[J]. Acta Optica Sinica, 43, 0434003(2023).

[23] Dai C, Wang Y, Miao Z M et al. Generation and application of high-order harmonics based on interaction between femtosecond laser and matter[J]. Laser & Optoelectronics Progress, 58, 0300001(2021).

[24] Li J, Li K, Zhang X S et al. Highly efficient and aberration-free off-plane grating spectrometer and monochromator for EUV: soft X-ray applications[J]. Light: Science & Applications, 13, 12(2024).

[25] Li K, Popmintchev D, Li R X et al. Globally optimized monochromator for coherent diffractive imaging with tunable EUV wavelength[C], HTh3B.3(2022).

[26] Schnürer M, Spielmann C, Wobrauschek P et al. Coherent 0.5-keV X-ray emission from helium driven by a sub-10-fs laser[J]. Physical Review Letters, 80, 3236-3239(1998).