• Laser & Optoelectronics Progress
  • Vol. 57, Issue 3, 032501 (2020)
Yuning Wang, Shilei Jiang*, Guobin Sun, Weiguo Liu, and Xiaogang Dang
Author Affiliations
  • School of Photoelectric Engineering, Xi'an Technological University, Xi'an, Shaanxi 710021, China
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    DOI: 10.3788/LOP57.032501 Cite this Article Set citation alerts
    Yuning Wang, Shilei Jiang, Guobin Sun, Weiguo Liu, Xiaogang Dang. Ion Beam Polishing Equivalent Removal and Polishing Experiments[J]. Laser & Optoelectronics Progress, 2020, 57(3): 032501 Copy Citation Text show less
    References

    [1] Zhou L, Dai Y F, Xie X H et al. A novel path used in computer-controlled polishing process based on uniform-area-increment spiral[J]. Journal of National University of Defense Technology, 31, 1-4(2009).

    [2] Li S Y, Dai Y F, Xie X H et al[M]. New technology for manufacturing and measurement of large and middle-scale aspheric surfaces, 92-93(2011).

    [3] Jiao C J, Li S Y, Wang D F et al. Material removal property in ion figuring process for optical components[J]. Optics and Precision Engineering, 15, 1520-1526(2007).

    [4] Zhou L. Study on theory and technology in ion beam figuring for optical surfaces[D]. Changsha: National University of Defense Technology, 34-35(2008).

    [5] Jiao C J. Study on the material removal mechanisms and fundamental processes for ion beam figuring optical mirrors[D]. Changsha: National University of Defense Technology, 20-23(2008).

    [6] Liao W L. Deterministic ion beam figuring technology for high-precision spherical components[D]. Changsha: National University of Defense Technology, 26-28(2010).

    [7] Allen L N. Progress in ion figuring large optics[J]. Proceedings of SPIE, 2428, 237-247(1994).

    [8] Michel F, Schindler A, Thomas H. Ion beam figuring of SiC mirrors provides ultimate WFE performances for any type of telescope[J]. Proceedings of SPIE, 3739, 142-154(1999).

    [9] Schindler A, Haensel T, Zeuner M et al. Ion beam figuring and ion beam polishing production tools-processing technology included-for customized solutions. [C]∥Optical Fabrication and Testing, June 18, 2000, Québec City, Canada. Washington, D.C.: OSA, OWA6(2000).

    [10] Dai Y F, Zhou L, Xie X H et al. Deterministic figuring in optical machining by ion beam[J]. Acta Optica Sinica, 28, 1131-1135(2008).

    [11] Tang W, Deng W J, Zheng L G et al. Calculation of removal function of ion beam figuring and polishing experiment[J]. Optics and Precision Engineering, 23, 31-39(2015).

    [12] Wu J F. Research on the ion beam figuring technology[D]. Changchun: University of Chinese Academy of Sciences, 40-42(2010).

    [13] Tang W. Research on removal model and technology for ion beam figuring large aspherical mirror[D]. Changchun: University of Chinese Academy of Sciences, 31-39(2016).

    [14] Duan G P. Study on removal characteristics of ion beam polishing[D]. Beijing: University of Chinese Academy of Sciences, 32-33(2013).

    [15] Wang Z Y, Zhang L X, Sun P F et al. Mathematical modeling method for generation of Gaussian-type removal function in fluid jet polishing[J]. Acta Optica Sinica, 38, 1022002(2018).

    [16] Li J, Zhang L X, Sun P F et al. Fast generation method of Gaussian-shaped removal function of fluid jet polishing[J]. Acta Optica Sinica, 38, 0722002(2018).

    [17] Xi J P, Li B, Ren D X et al. Research progress of measurement technology for large-diameter aspheric elements on grinding stage[J]. Laser & Optoelectronics Progress, 55, 030008(2018).

    Yuning Wang, Shilei Jiang, Guobin Sun, Weiguo Liu, Xiaogang Dang. Ion Beam Polishing Equivalent Removal and Polishing Experiments[J]. Laser & Optoelectronics Progress, 2020, 57(3): 032501
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