The influence of nanoimprint technology on the epitaxial materials is analyzed with the use of photoluminescence and X-ray diffraction. 1.55 μm distributed feedback (DFB) laser diodes for optical fiber communication are fabricated using nanoimprint technology, and then accelerating life test is applied to these devices. Results show that soft stamp nanoimprint will not lead to a serious degradation of the epitaxial materials. The lifetimes of the lasers fabricated by nanoimprint and exposure method are on the same order of magnitude, indicating that nanoimprint technology is safe and reliable to the fabrication of lasers.