Yanjun Sun, Jun Wang, Xuesong Ji, Li Wang, Yue Wang, Zhe Li. Simulation and Experiment of Grooved Grating Microstructure for Infrared Chromatic Aberration Correction[J]. Acta Optica Sinica, 2018, 38(7): 0724002
- Acta Optica Sinica
- Vol. 38, Issue 7, 0724002 (2018)
Fig. 1. Grooved grating microstructure
Fig. 2. Phase modulation spectra of grooved grating microstructure with wavelengths of (a) 4.8 μm and (b) 10.6 μm
Fig. 3. Transmittance spectra of grooved grating microstructure with wavelengths of (a) 4.8 μm and (b) 10.6 μm
Fig. 4. Distribution of phase retardation
Fig. 5. Distribution of output light field
Fig. 6. Chromatic aberration curves of ZnSe lens (a) without and (b) with grooved grating microstructure
Fig. 7. Coating properties of ZEP520 photoresist
Fig. 8. Testing and stitching of sub-field. (a) Home field offset of 1 mm×1 mm; (b) home field offset of 200 μm×200 μm
Fig. 9. Comparison for graphic quality at different exposure parameters. (a) Insufficient exposure; (b) sufficient exposure
Fig. 10. Surface morphology of sample from SEM
Fig. 11. Measured height of grooved grating microstructure
Fig. 12. Infrared spectroscopy performance with wavelengths of (a) 4.8 μm and (b) 10.6 μm
|
Table 1. Parameters of grooved grating microstructure unit
|
Table 2. Test data of longitudinal chromatic aberration
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20