Jian Sun, Yuanda Wu, Weifeng Wu, Chongxin Shan. Optimization of Polarization-Dependent Loss of Arrayed Waveguide Grating Demultiplexer[J]. Chinese Journal of Lasers, 2020, 47(1): 0106003
- Chinese Journal of Lasers
- Vol. 47, Issue 1, 0106003 (2020)
Fig. 1. Fabrication process of AWG chip
Fig. 2. Morphology photos of rectangular waveguide. (a) Optical microscope photograph; (b) SEM image
Fig. 3. Relation between film properties and gas flow. (a) Refractive index of film and deposition rate versus gas flow of B2H6/PH3; (b) relation between film stress and gas flow of B2H6/PH3
Fig. 4. Diagram of testing system of chip
Fig. 5. Relation between polarization characteristics of chip and gas flow. (a) PDL and transmission spectrum versus gas flow; (b) output spectra of AWG with high doped cladding
Fig. 6. Relation between PDW of chip and gas flow of B2H6/PH3
Fig. 7. Relation between adjacent channel crosstalk and gas flow of B2H6/PH3
Fig. 8. Relation between PDL of chip and over etching depth
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