• Laser & Optoelectronics Progress
  • Vol. 47, Issue 2, 22201 (2010)
Chen Lizi*, Guan Xiaowei, and Zhang Zheng
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/lop47.022201 Cite this Article Set citation alerts
    Chen Lizi, Guan Xiaowei, Zhang Zheng. Development and Application of MEMS Deformable Mirror[J]. Laser & Optoelectronics Progress, 2010, 47(2): 22201 Copy Citation Text show less
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    Chen Lizi, Guan Xiaowei, Zhang Zheng. Development and Application of MEMS Deformable Mirror[J]. Laser & Optoelectronics Progress, 2010, 47(2): 22201
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