Columnar Nanograined BaTiO3 Ferroelectric Thin Films Integrated on Si with a Sizable Dielectric Tunability

Yuyao ZHAO; Jun OUYANG

doi:10.15541/jim20210437

Journals >Journal of Inorganic Materials >Volume 37 >Issue 6 >Page 596 > Article

Journal of Inorganic Materials
Vol. 37, Issue 6, 596 (2022)

Columnar Nanograined BaTiO₃ Ferroelectric Thin Films Integrated on Si with a Sizable Dielectric Tunability

Yuyao ZHAO¹ and Jun OUYANG^1,2,*

Author Affiliations

¹1. Key Laboratory for Liquid-Solid Structure Evolution and Processing of Materials, School of Materials Science and Engineering, Shandong University, Jinan 250061, China

²2. School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, China

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DOI: 10.15541/jim20210437 Cite this Article

Yuyao ZHAO, Jun OUYANG. Columnar Nanograined BaTiO₃ Ferroelectric Thin Films Integrated on Si with a Sizable Dielectric Tunability [J]. Journal of Inorganic Materials, 2022, 37(6): 596 Copy Citation Text

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Phase structure analyses of BaTiO3 films

1. Phase structure analyses of BaTiO₃ films

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Nanostructures of BaTiO3 films deposited at (a-c) 450 ℃ and (d-f) 500 ℃

2. Nanostructures of BaTiO₃ films deposited at (a-c) 450 ℃ and (d-f) 500 ℃

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3. Electrical performance of BaTiO₃ films

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4. Dielectric tunability performance of the BaTiO₃ films

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Yuyao ZHAO, Jun OUYANG. Columnar Nanograined BaTiO₃ Ferroelectric Thin Films Integrated on Si with a Sizable Dielectric Tunability [J]. Journal of Inorganic Materials, 2022, 37(6): 596

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