• Acta Optica Sinica
  • Vol. 33, Issue 8, 806002 (2013)
You Jingjing*, Wang Ming, Rong Hua, and Dai Lihua
Author Affiliations
  • [in Chinese]
  • show less
    DOI: 10.3788/aos201333.0806002 Cite this Article Set citation alerts
    You Jingjing, Wang Ming, Rong Hua, Dai Lihua. Fiber Fabry-Pérot Accelerometer Based on SU-8 Photoresist[J]. Acta Optica Sinica, 2013, 33(8): 806002 Copy Citation Text show less
    References

    [1] Jesus M Corres, Javier Bravo, Francisco J Arregui, et al.. Vibration monitoring in electrical engines using an in-line fiber etalon [J]. Sensors and Actuators A, 2006, 132(12): 506-515.

    [2] Wang Daihua, Liu Shuxin, Yuan Gang, et al.. Study on parallel multiplexed fabry-perot fiber optic accelerometers and the signal demodulation method [J]. Acta Optica Sinica, 2010, 30(6): 1776-1782.

    [3] Ke Tao, Zhu Tao, Rao Yunjiang, et al.. Accelerometer based on all-fiber Fabry-Perot interferometer formed by hollow-core photonic crystal fiber [J]. Chinese J Lasers, 2010, 37(1): 171-175.

    [4] Xu Yuxian, Zhao Changde, Sun Xudong, et al.. Accelerometer and its application in vehicles comfort evaluation [J]. J Tsinghua University (Sci & Tech), 1998, 38(11): 9-11.

    [5] Xiong Xingguo, Zou Qiang, Lu Deren, et al.. Silicon bulk-micromachined interdigitated differential capacitive accelerometer [J]. Journal of Functional Materials and Devices, 1998, 4(2): 114-120.

    [6] Du Linqun, Jia Shengfang, Nie Weirong, et al.. Fabrication of fuze micro-electro-mechanical system safety device [J]. Chinese Journal of Mechanical Engineering, 2011, 24(5): 836-841.

    [7] He Gaofa, Tang Yike, Zhou chuande, et al.. Novel resonant accelerometer with micro leverage fabricated by MEMS technology [J]. Chinese Journal of Mechanical Engineering, 2011, 24(3): 495-500.

    [8] Jinghua Zhang, Xueguang Qiao, Manli Hu, et al.. Proposal of metal bellows-based fiber bragg grating accelerometer [J]. Chin Opt Lett, 2011, 9(9): 090606.

    [9] Lou Jun, Fu Shaojun, Xu Xiangdong, et al.. Design and fabrication of holographic variable line-spacing grating for position sensor [J]. Acta Physica Sinica, 2006, 55(12): 6405-6409.

    [10] Zhang Le, Wu Bo, Ye Wen, et al.. Highly sensitive fiber-optic vibration sensor based on frequency-locking of a FBG Fabry-perot cavity [J]. Acta Optica Sinica, 2011, 31(4): 0406006.

    [11] Yang Chundi, Wang Ming, Ge Yixian, et al.. A miniature extrinsic fiber fabry-perot pressure sensor [J]. Acta Optica Sinica, 2010, 30(5): 1358-1361.

    [12] Wang Tingting, Wang Ming, Li Ming, et al.. Dual-wavelength demodulation and wavelength optimization for optical fiber-perot sensor [J]. Acta Optica Sinica, 2005, 25(10): 1297-1301.

    [13] Ni Xiaoqi, Wang Ming, Chen Xuxing, et al.. Wavelength multiplexing of optical fiber microelectromechanical system Fabry-Perot pressure sensor [J]. Acta Optica Sinica, 2007, 27(5): 0776-0780.

    [14] Chun-Jun Lin, Fan-Gang Tseng. A micro Fabry-Perot sensor for nano-lateral displacement sensing withenhanced sensitivity and pressure resistance [J]. Sensor and Actuator A, 2004, 114(2-3): 163-170.

    [15] Gou Wenxuan. Mechanics of Materials(I) (2nd edition) [M]. Beijing: Science Press, 2010. 315-320.

    [16] Chen Hong, Bao Minhang. Air damping of micromechanical silicon accelerometers [J]. Chinese Journal of Semiconductors, 1995, 16(12): 921-927.

    CLP Journals

    [1] Li Hao, Gu Yunlong, Zheng Yang, Chen Changming, Wang Xibin, Yi Yunji, Sun Xiaoqiang, Wang Fei, Zhang Daming. All-Polymer Athermal Low Polarization-Independent 49-Channel Arrayed Waveguide Grating[J]. Acta Optica Sinica, 2015, 35(4): 423001

    [2] Zhang Kaiyu, Zhao Hong, Yang Yuqiang, Zhang Weichao. High Voltage Electrostatic Sensor Based on Fabry-Perot Interferometer[J]. Acta Optica Sinica, 2014, 34(11): 1106002

    You Jingjing, Wang Ming, Rong Hua, Dai Lihua. Fiber Fabry-Pérot Accelerometer Based on SU-8 Photoresist[J]. Acta Optica Sinica, 2013, 33(8): 806002
    Download Citation