• Opto-Electronic Engineering
  • Vol. 41, Issue 8, 16 (2014)
XU Yongxiang*, ZHANG Qianfang, LIU Songsong, and LIU Yi
Author Affiliations
  • [in Chinese]
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    DOI: 10.3969/j.issn.1003-501x.2014.08.003 Cite this Article
    XU Yongxiang, ZHANG Qianfang, LIU Songsong, LIU Yi. 3D Micro Topography Measurement Based on Spatial Frequency Domain Algorithm[J]. Opto-Electronic Engineering, 2014, 41(8): 16 Copy Citation Text show less
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    XU Yongxiang, ZHANG Qianfang, LIU Songsong, LIU Yi. 3D Micro Topography Measurement Based on Spatial Frequency Domain Algorithm[J]. Opto-Electronic Engineering, 2014, 41(8): 16
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