• Laser & Optoelectronics Progress
  • Vol. 55, Issue 10, 102201 (2018)
He Lipeng and Lin Feng
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/lop55.102201 Cite this Article Set citation alerts
    He Lipeng, Lin Feng. Design and Tolerance Analysis of UV Industrial Inspection Optical System[J]. Laser & Optoelectronics Progress, 2018, 55(10): 102201 Copy Citation Text show less

    Abstract

    In order to meet the detection and identification requirements of products in the ultraviolet (UV) band, we design a set of UV industrial inspection optical system with wide spectrum, large field of view, large aperture and compact structure. Its design requirements are: UV industrial inspection lens with working wavelength of 240-320 nm, full field of view angle of 40°, system focal length of 15 mm, F number of 3, and total system length of less than 60 mm. The system uses MS20-UV type UV charge coupled device (CCD) with a resolution of 1920 pixel×1080 pixel, pixel size of 5.48 μm×5.48 μm. Considering the cost and image quality, the design adopts the global transmissive and non-glued solution. The system uses an anti-telescopic objective lens as the initial structure and uses Zemax optical software to design. The tolerance analysis is performed on the design results to determine the source of the tolerance error in combination with the requirements of the process requirement. And the relevant structure is optimized. Monte-Carlo simulation results before and after optimization are compared. Finally, the UV lens is designed with the modulation transfer function (MTF) of full field of view of more than 0.5 in the range of 100 lp/mm, the field curvature of less than 0.1 mm and the distortion of less than 1.3%. Compared with other UV systems, this system has the advantages of high image quality, high resolution, low distortion, short focal length and compact structure.
    He Lipeng, Lin Feng. Design and Tolerance Analysis of UV Industrial Inspection Optical System[J]. Laser & Optoelectronics Progress, 2018, 55(10): 102201
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