• Journal of Infrared and Millimeter Waves
  • Vol. 31, Issue 4, 311 (2012)
MIAO Feng-Juan1、2、*, TAO Bai-Rui1、2, and CHU Jun-Hao2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3724/sp.j.1010.2012.00311 Cite this Article
    MIAO Feng-Juan, TAO Bai-Rui, CHU Jun-Hao. Fabrication of arrays of one-dimensional porous silicon photonic crystal[J]. Journal of Infrared and Millimeter Waves, 2012, 31(4): 311 Copy Citation Text show less

    Abstract

    With the aid of photolithography, arrays of one-dimensional porous silicon photonic crystals with the middle infrared mid-gap (λ=5、6、7、10 μm) were fabricated successfully by the combination of microelectronic technique and the electrochemical etching method. For practical use, the roughness of the surface was improved by depositing a Si3N4 thin film with 5000 A°. Then their optical and roughness properties were characterized by FTIR and AFM, respectively. As a result of the synergetic effects rendered by heat isolation and high reflection properties, the array of the one-dimensional porous silicon photonic crystal exhibits feasibility as the substrate for pyroelectric infrared sensor.
    MIAO Feng-Juan, TAO Bai-Rui, CHU Jun-Hao. Fabrication of arrays of one-dimensional porous silicon photonic crystal[J]. Journal of Infrared and Millimeter Waves, 2012, 31(4): 311
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