• Opto-Electronic Engineering
  • Vol. 37, Issue 2, 45 (2010)
CHU Dong*, GONG Xing-zhi, CHENG Liang, and YU Fei-hong
Author Affiliations
  • [in Chinese]
  • show less
    DOI: 10.3969/j.issn.1003-501x.2010.02.008 Cite this Article
    CHU Dong, GONG Xing-zhi, CHENG Liang, YU Fei-hong. Multilayer Film Thickness Measurement Based on Genetic Simulated Annealing Algorithm[J]. Opto-Electronic Engineering, 2010, 37(2): 45 Copy Citation Text show less
    References

    [1] Laaziz Y,Bennouna A,Elazhari M Y,et al. A method for monitoring the thickness of semiconductor and dielectric thin films:application to the determination of large area thickness profiles [J]. Thin Solid Films(S0040-6090),1997,303:255-263.

    [2] Luňá ek Ji i,Hlubina Petr,Luňá ková Milena. Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement [J]. Applied Optics(S0003-6935),2009,48(5):985-989.

    [3] MA Yuan-sheng,LIU Xu,GU Pei-fu,et al. Estimation of optical constants of thin film by the use of artificial neural networks [J]. Applied Optics(S0003-6935),1996,35(25):5035-5039.

    [4] LIU Peng,LIU Yu-ling,YU Fei-hong,et al. Thin Film Thickness Determination Using Adaptive Simulated Annealing [J]. Opto-Electronic Engineering,2005,32(6):93-96.

    [5] Gong Xing-zhi,Chen Yan-ping,LIU Yu-ling,et al. The Application of Genetic Algorithm In Thin Film Characters Measurement [J]. Acta Photonica Sinica,2007,36(11):2053-2056.

    [6] O uz K ysal,Duygu nal,Serhat zder,et al. Thickness measurement of dielectric films by wavelength scanning method [J]. Optics Communications(S0030-4018),2002,205(1/3):1-6.

    [7] GU Pei-fu. Thin film Technology [M]. Hangzhou:Zhejiang University Press,1990.

    [8] CHEN Rui,WANG Feng-li,ZHU Jing-tao,et al. Design of 30.4nm Multilayer Based on Genetic Algorithms [J]. Acta Photonica Sinica,2003,37(9):1819-1824.

    [9] CHEN Hua-gen,WU Jian-sheng,WANG Jia-lin. Mechanism study of simulated annealing algorithm [J]. Journal of Tongji University:Natural Science,2004,32(6):802-805.

    [10] QU Zhi-yi,WEN Xue-fei,FAN Zhi-ming,et al. An optimization algorithm for multiple constrained QOS multicast routing based on genetic and simulated annealing algorithm [J]. Computer application and software,2007,24(12):182-184

    CLP Journals

    [1] SHAN Liang, KONG Ming. Photon Correlation Spectroscopy for Nano-particle Diameter Measurement with Weighted Nonnegative Least Squares[J]. Acta Photonica Sinica, 2013, 42(6): 684

    CHU Dong, GONG Xing-zhi, CHENG Liang, YU Fei-hong. Multilayer Film Thickness Measurement Based on Genetic Simulated Annealing Algorithm[J]. Opto-Electronic Engineering, 2010, 37(2): 45
    Download Citation