Shizhuang Sun, Chunshui Jin, Bo Yu, Tao Guo, Shun Yao, Chun Li, Wenyuan Deng. Reflection and Resputtering of Mo/Si Atoms During High-Energy Deposition[J]. Acta Optica Sinica, 2020, 40(11): 1102001
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Shizhuang Sun, Chunshui Jin, Bo Yu, Tao Guo, Shun Yao, Chun Li, Wenyuan Deng. Reflection and Resputtering of Mo/Si Atoms During High-Energy Deposition[J]. Acta Optica Sinica, 2020, 40(11): 1102001