Wang Dapeng, Jin Xing, Zhou Weijing, Li Nanlei. Nonlinear Error Calibration Method for Capacitive Displacement Sensor Based on Laser Interferometry[J]. Laser & Optoelectronics Progress, 2017, 54(10): 101203
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Wang Dapeng, Jin Xing, Zhou Weijing, Li Nanlei. Nonlinear Error Calibration Method for Capacitive Displacement Sensor Based on Laser Interferometry[J]. Laser & Optoelectronics Progress, 2017, 54(10): 101203