• Acta Optica Sinica
  • Vol. 33, Issue 9, 922003 (2013)
Chen Zhili* and Liu Weiguo
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/aos201333.0922003 Cite this Article Set citation alerts
    Chen Zhili, Liu Weiguo. Nanodots Pattern and Optical Properties of Monocrystalline Silicon Induced by Low Energy Ion Beam[J]. Acta Optica Sinica, 2013, 33(9): 922003 Copy Citation Text show less
    References

    [1] T Bobek, S Facsko, T Dekorsy, et al.. Ordered quantum dot formation on GaSb surfaces during ion sputtering [J]. Nuclear Instruments and Methods in Physics Research B, 2001, 178(1-4): 101-104.

    [2] B Ziberi, F Frost, B Rauschenbach. Pattern transitions on Ge surfaces during low-energy ion beam erosion [J]. Appl Phys Lett, 2006, 88(17): 173115.

    [3] F Frost, R Fechner, D Flamm, et al.. Ion beam assisted smoothing of optical surfaces [J]. Appl Phys A, 2004, 78(5): 651-654.

    [4] K Takahiro, K Ozaki, K Kawatsura, et al.. Ion-induced self-organized ripple patterns on graphite and diamond surfaces [J]. Appl Surf Sci, 2009, 256(4): 972-975.

    [5] S K Tan, R Liu, C H Sow, et al.. Self-organized nanodot formation on InP(100) by oxygen ion sputtering [J]. Nuclear Instruments and Methods in Physics Research B, 2006, 248(1): 83-89.

    [6] H Park, H W Choi, W K Choi. Nano patterning and structuring of InP(100) by low energy ion beam irradiation [J]. Surface & Coatings Technology, 2007, 201(19-20): 8469-8476.

    [7] Wang Haibin, Liu Quan, Wu jianhong. Fabrication of convex blazed grating by Ar+ ion-beam etching [J]. Acta Optica Sinica, 2011, 31(4): 0405002.

    [8] Xu Qinfang, Liang Lei, Hu Manli, et al.. Antireflection of silica nano-microsphere surface structure in visible light [J]. Acta Optica Sinica, 2012, 32(12): 1216001.

    [9] Ding Wenge, Lu Yunxia, Sun Xue, et al.. Temperature-dependent photoluminescence of silicon-nanostructure thin film [J]. Acta Optica Sinica, 2012, 32(8): 0831002.

    [10] B Ziberi, F Frost, B Rauschenbach. Formation of large-area nanostructures on Si and Ge surfaces during low energy ion beam erosion [J]. J Vac Sci Technol A, 2006, 24(4): 344-1348.

    [11] B Ziberi, F Frost, M Tartz, et al.. Ripple rotation, pattern transitions, and long range ordered dots on silicon by ion beam erosion [J]. Appl Phys Lett, 2008, 92(6): 063102.

    [12] F Frost, B Ziberi, A Schindler, et al.. Surface engineering with ion beams: from self-organized nanostructures to ultra-smooth surfaces [J]. Appl Phys A, 2008, 91(3): 551-559.

    [13] T W H Oates, A Keller, S Noda, et al.. Self-organized metallic nanoparticle and nanowire arrays from ion-sputtered silicon templates [J]. Appl Phys Lett, 2008, 93(6): 063106.

    [14] A Toma, D Chiappe, D Massabò, et al.. Self-organized metal nanowire arrays with tunable optical anisotropy [J]. Appl Phys Lett, 2008, 93(16): 163104.

    [15] R M Bradley, J M Harper. Theory of ripple topography induced by ion bombardment [J]. Journal of Vacuum Science and Technology, 1988, 6(4): 2390-2395.

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    Chen Zhili, Liu Weiguo. Nanodots Pattern and Optical Properties of Monocrystalline Silicon Induced by Low Energy Ion Beam[J]. Acta Optica Sinica, 2013, 33(9): 922003
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