Spectral Characteristics of Si Quantum Dots Embedded in SiNx Thin Films Prepared by Magnetron Co-Sputtering

CHEN Xiao-bo; YANG Wen; DUAN Liang-fei; ZHANG Li-yuan; YANG Pei-zhi; SONG Zhao-ning

doi:10.3964/j.issn.1000-0593(2015)07-1770-04

Journals >Spectroscopy and Spectral Analysis >Volume 35 >Issue 7 >Page 1770 > Article

Spectroscopy and Spectral Analysis
Vol. 35, Issue 7, 1770 (2015)

Spectral Characteristics of Si Quantum Dots Embedded in SiN_x Thin Films Prepared by Magnetron Co-Sputtering

CHEN Xiao-bo^1、2、*, YANG Wen¹, DUAN Liang-fei¹, ZHANG Li-yuan¹, YANG Pei-zhi¹, and SONG Zhao-ning³

Author Affiliations

¹[in Chinese]

²[in Chinese]

³Department of Physics and Astronomy,University of Toledo,Toledo,OH 43606,USA

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DOI: 10.3964/j.issn.1000-0593(2015)07-1770-04 Cite this Article

CHEN Xiao-bo, YANG Wen, DUAN Liang-fei, ZHANG Li-yuan, YANG Pei-zhi, SONG Zhao-ning. Spectral Characteristics of Si Quantum Dots Embedded in SiN_x Thin Films Prepared by Magnetron Co-Sputtering[J]. Spectroscopy and Spectral Analysis, 2015, 35(7): 1770 Copy Citation Text

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