Self-calibration Correction Measurement of Micro-angle Based on F-P Etalon Multi-beam Interference Imaging

Shinan ZHOU; Xiaoyan SHEN; Dongsheng LI; Chenguang WU

doi:10.3788/gzxb20225104.0412007

Journals >Acta Photonica Sinica >Volume 51 >Issue 4 >Page 0412007 > Article

Acta Photonica Sinica
Vol. 51, Issue 4, 0412007 (2022)

Self-calibration Correction Measurement of Micro-angle Based on F-P Etalon Multi-beam Interference Imaging

Shinan ZHOU, Xiaoyan SHEN^*, Dongsheng LI, and Chenguang WU

Author Affiliations

College of Metrology & Measurement Engineering，China Jiliang University，Hangzhou 310018，China

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DOI: 10.3788/gzxb20225104.0412007 Cite this Article

Shinan ZHOU, Xiaoyan SHEN, Dongsheng LI, Chenguang WU. Self-calibration Correction Measurement of Micro-angle Based on F-P Etalon Multi-beam Interference Imaging[J]. Acta Photonica Sinica, 2022, 51(4): 0412007 Copy Citation Text

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Fig. 1. Micro-angle measurement optical path based on F-P etalon^［18］

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Fig. 2. Self-calibration process schematic diagram of micro-angle measurement system

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$The algorithm error simulation results of exact fraction method$

Fig. 3. The algorithm error simulation results of exact fraction method

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Fig. 4. Simulation results of F-P etalon interval calculation error changing with temperature and humidity

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Fig. 5. Micro-angle measuring device^［18］

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Fig. 6. Concentric interference rings corresponding to different wavelengths

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	λ₁ = 546.081 10 nm	λ₂ = 576.967 84 nm	λ₃ = 579.074 30 nm
ε_j	0.766 4	0.616 3	0.201 9
U_εj	0.010 2	0.009 9	0.009 5
k₀_j	7 325	6 933	6 908

Table 1. Different wavelength λ_j and its corresponding ε_j and k₀_j

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No.	δ/μm	$s_{δ}$ /μm	Not self-calibrated f₁=80 mm U_p（f₁）/f₁=0.361		Self-calibrated but not corrected f₂=78.178 mm U_p（f₂）/f₂=0.014		Self-calibrated and corrected f '=78.540 mm U_p（f '）/f '=0.007
No.	δ/μm	$s_{δ}$ /μm	α/（″）	U_p（α）/（″）	α/（″）	U_p（α）/（″）	α'/（″）	U_p（α'）/（″）
0-1	0.157	0.012	0.202	0.041	0.207	0.041	0.206	0.041
0-2	0.269	0.012	0.347	0.041	0.354	0.041	0.353	0.041
0-3	0.263	0.012	0.339	0.041	0.348	0.041	0.345	0.041
1-1	76.991	0.014	99.253	0.398	101.567	0.056	101.098	0.048
1-2	77.169	0.013	99.483	0.399	101.802	0.056	101.331	0.048
1-3	77.237	0.012	99.570	0.399	101.891	0.056	101.421	0.048
2-1	153.655	0.014	198.085	0.755	202.701	0.071	201.766	0.055
2-2	153.699	0.013	198.142	0.755	202.759	0.071	201.824	0.055
2-3	153.806	0.013	198.280	0.756	202.900	0.071	201.964	0.055
3-1	230.224	0.012	296.794	1.111	303.710	0.087	302.309	0.062
3-2	230.291	0.012	296.880	1.111	303.800	0.087	302.397	0.062
3-3	230.434	0.013	297.064	1.112	303.988	0.087	302.584	0.062
4-1	306.901	0.012	395.641	1.468	404.863	0.102	402.993	0.069
4-2	306.958	0.012	395.715	1.468	404.937	0.102	403.068	0.069
4-3	307.099	0.011	395.896	1.469	405.123	0.102	403.253	0.069
5-1	383.563	0.012	494.468	1.824	505.993	0.117	503.657	0.077
5-2	383.611	0.012	494.530	1.825	506.057	0.117	503.720	0.077
5-3	383.819	0.012	494.798	1.826	506.330	0.117	503.993	0.077
6-1	460.229	0.012	593.300	2.181	607.128	0.132	604.325	0.084
6-2	460.323	0.012	593.421	2.181	607.252	0.132	604.448	0.084
6-3	460.297	0.012	593.388	2.181	607.217	0.132	604.414	0.084

Table 2. Comparison of micro-angle measurement results before and after self-calibration

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