Yunzhuang CHEN, Leijie LAI, Pengzhi LI, Limin ZHU. Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control[J]. Optics and Precision Engineering, 2023, 31(18): 2675
- Optics and Precision Engineering
- Vol. 31, Issue 18, 2675 (2023)
Fig. 1. Multi-DOF long-stroke flexure parallel mechanism
Fig. 2. Structural diagram of leaf-spring flexure spherical hinge
Fig. 3. Kinematic model of micro-positioning stage
Fig. 4. Force analysis of clarinet
Fig. 5. Structural diagram of leaf-spring flexure spherical hinge
Fig. 6. Input stiffness analysis
Fig. 7. Composite control block diagram of multi-DOF micropositioning stage
Fig. 8. Measured frequency response and identification results
Fig. 9. Amplitude and phase margin of uncorrected system before and after open-loop gain adjustment
Fig. 10. Open loop bode diagram of the system after adding PI controller with phase advanced
Fig. 11. SMC control block diagram
Fig. 12. Experimental system of micro-positioning stage
Fig. 13. Maximum stroke
Fig. 14. Cross-axis coupling errors
Fig. 15. Triangular wave track tracking results
Fig. 16. Space cylindrical spiral track tracking results
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Table 1. Dimension parameters of spherical hinge
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Table 2. Compliance of leaf-spring spherical hinge
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Table 3. Single-axis trajectory tracking performance of micro-positioning stage（Triangular wave track）
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Table 4. Three-axis spatial trajectory tracking performance of micro-positioning stage（Cylindrical spiral track)
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