Common Path Laser Heterodyne Interferometer for On-Line Measuring Surface Roughness

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 19 >Issue 7 >Page 958 > Article

Acta Optica Sinica
Vol. 19, Issue 7, 958 (1999)

Common Path Laser Heterodyne Interferometer for On-Line Measuring Surface Roughness

[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

show less

DOI: Cite this Article Set citation alerts

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Common Path Laser Heterodyne Interferometer for On-Line Measuring Surface Roughness[J]. Acta Optica Sinica, 1999, 19(7): 958 Copy Citation Text

show less

References

[1] Mitsui K. In-process sensors for surface roughness and their applications. Precision Engng., 1986, 8(4):212～220

[2] Huang C C. Optical heterodyne profilometer. Optical Engineering, 1984, 23(4):356～370

[4] Kohno T, Ozawa N, Miyamoto K et al.. High precision optical surface sensor. Applied Optics, 1988, 27(1):103～108

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Common Path Laser Heterodyne Interferometer for On-Line Measuring Surface Roughness[J]. Acta Optica Sinica, 1999, 19(7): 958

Download Citation

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information