Instantaneous wavefront measurement of large aperture optical elements

Meng Shi; Chen Lei; Zhu Wenhua; Sun Qinyuan; Zhang Rui

doi:10.12086/oee.2018.170536

[1] Malacara D. Optical Shop Testing[M]. Hoboken, N.J: Willy, 2007.

[2] Hernandez-Gomez C, Collier J L, Hawkes S J, et al. Wave-front control of a large-aperture laser system by use of a static phase corrector[J]. Applied Optics, 2000, 39(12): 1954–1961.

[3] Zhang J P, Zhang X J, Zhang Z Y, et al. Test of rotationally symmetric aspheric surface using Shack-Hartmann wavefront sensor[ J]. Optics and Precision Engineering, 2012, 20(3): 492–498.

[4] He X, Ma J. Design of common path radial shearing interferometer[ J]. Optics and Precision Engineering, 2011, 19(9): 2029– 2035.

[5] Ling T, Liu D, Yang Y Y, et al. Off-axis cyclic radial shearing interferometer for measurement of centrally blocked transient wavefront[J]. Optics Letters, 2013, 38(14): 2493–2495.

[6] Millerd J E, Martnek S J, Brock J N, et al. Instantaneous phaseshift point-diffraction interferometer[J]. Proceedings of SPIE, 2004, 5380: 422–429.

[7] Neal M R, Wyant C J. Polarization phase-shifting point-diffraction interferometer[J]. Applied Optics, 2006, 45(15): 3463–3476.

[8] Liu J F, Li Y Q, Liu K. Technical problems in phase-shifting point diffraction interferometer[J]. Chinese Journal of Scientific Instrument, 2007, 28(4): 179–182.

[9] Du Y Z, Feng G Y, Li H R, et al. Circular common-path point diffraction interferometer[J]. Optics Letters, 2012, 37(19): 3927– 3929.

[10] Wu Y Q. Cyclic common-path point-diffraction interferometer based on Fourier-transiorm method[D]. Hohhot: Inner Mongolia University of Technology, 2014.

[11] Wu Y Q, Bai F Z, Liu Z, et al. Circular common-path point-diffraction interferometer[J]. Optical Technique, 2014, 40(5): 421–424.

[12] Li J P, Chen L, Wan J, et al. Evaluation of Φ400 mm instantaneous wavefront using grating point diffraction interferometry[J]. Optics and Precision Engineering, 2015, 23(6): 1538–1546.

[13] Lu Z X, Jin C S, Ma D M, et al. Analysis of effect of tiny pinhole deviation on far-field wave-front quality[J]. Acta Optica Sinica, 2011, 31(8): 0812002.

[14] Takeda M, Ina H, Kobayashi S. Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry[ J]. Journal of the Optical Society of America, 1982, 72(1): 156–160.

[15] Roddier C, Roddier F. Interferogram analysis using Fourier transform techniques[J]. Applied Optics, 1987, 26(9): 1668–1673.