Study of Soft X-Ray Multilayer Beamsplitters

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 19 >Issue 3 >Page 398 > Article

Acta Optica Sinica
Vol. 19, Issue 3, 398 (1999)

Study of Soft X-Ray Multilayer Beamsplitters

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

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DOI: Cite this Article Set citation alerts

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of Soft X-Ray Multilayer Beamsplitters[J]. Acta Optica Sinica, 1999, 19(3): 398 Copy Citation Text

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Abstract

The design and testing of the soft X-ray multilayer beam-splitters are presented. The beam-splitters of Mo/Si multilayer with a large area by etching substrate and separating multilayer from substrate with NaCl coating are fabricated.

Keywords

beam-splitter etch separate soft X-ray multilayer