Research on Large Field-of-view White Light Interferometry Measurement System and Performance

Tao LIU; Zhibin WANG; Jiaqi HU; Yaonan HE; Weichang JING; Enjing CHEN; Wenlong ZHOU; Guoming YU; Ning YANG; Di ZHAO; Guofeng ZHANG; Shuming YANG

doi:10.3788/gzxb20245301.0112003

[1] D MALACARA. Optical shop testing(third edition)(2007).

[2] Jiubin TAN, Tao LIU, Jian LIU. Theory on 3D high resolution confocal imaging technique and mesurement(2014).

[3] M DAVIDSON. Method and apparatus of using a two-beam interference microscope for inspection of integrated circuits and the like.

[4] B S LEE, T C STRAND. Profilometry with a coherence scanning microscope. Applied Optics, 29, 3784-3788(1990).

[5] L DECK, P DEGROOT. High-speed noncontact profiler based on scanning white-light interferometry. Applied Optics, 33, 7734-7338(1994).

[6] P DEGROOT, L DECK. Surface profiling by analysis of white-light interferograms in the spatial frequency domain. Journal of Modern Optics, 42, 389-401(1995).

[7] A HARASAKI, J SCHMIT, J C WYANT. Improved vertical-scanning interferometry. Applied Optics, 39, 2107-2115(2000).

[8] Yi ZHOU, Yan TANG, Qinyuan DENG et al. Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes. Optics & Laser Technology, 93, 187-193(2017).

[9] N N PHAN, H H LE, D C DUONG. Surface curvature measurement of microlenses using a white-light interference microscope and fast geometric fit algorithm. Optical Engineering, 58, 124105(2019).

[10] P DEGROOT. Principles of interference microscopy for the measurement of surface topography. Advances in Optics and Photonics, 7, 1-65(2015).

[11] B AHN, A JO, J LEE et al. Automatic defect review of a patterned wafer using hybrid metrology(2021).

[12] Xiaodong ZHANG, Linlin ZHU, Fanwei JIAO et al. A device for measuring three-dimensional wafer surface topography and its measuring method.

[13] Zhen WANG. Principle and experimental research of new algorithm of optical fiber white light interferometry(2014).

[14] Long MA. Study on white light scanning interferometry: measurement and system(2011).

[15] Zili LEI. Research on the key technologies and measuring system for large-scale microstructure surface topography with white light interference(2018).

[16] Ping LI. Surface topography evaluation and error compensation based on white light interferometry(2021).

[17] Junwen TAN. Composite phase shift 3D reconstruction and multi-view shape alignment method for white light interferometry system(2022).

[18] Han MENG, Xinjun WAN, Yifan DONG et al. Design of optical system for large magnification interference microscope objective. Laser & Optoelectronics Progress, 54, 112205(2017).

[19] Haobiao YU. Research on the design and alignment technology of white light interference objective with large field of view(2019).

[20] Hui CHEN. Design of 20× Mirau type white light interference microscope objectives lens. Laser and Infrared, 52, 1402-1406(2022).

[21] Hong CHANG. Study on the large range characterization methods of micro-structures based on white light scanning interferometry(2009).

[22] Linlin ZHU. Research on key technologies of compact composite large-range white light interferometry(2020).

[23] Rong DAI. Research on white light interferometric surface topography measurement system based on vertical scanning table(2007).

[24] Qian LI. Structure design of white light interferermeterwith large range(2015).

[25] Jingda ZHANG. Research on in-situ detection technology of ultra-precision turning surface microstructure based on optical interferometry(2016).

[26] Shengxing SHI. Research on embedded three-dimensional white light interferometric data processing system(2018).

[27] Longcheng YU. Study on the thickness and characteristics of film on water surface based on white-light interferometer(2005).

[28] Weiyi WANG. Design and research on micromorphology detection system based on white light interference(2018).

[29] Zhibin WANG. Research on white light interferometry system and algorithm with large field of view(2023).

[30] Feifei WANG, Liangqing LIU, Peng YU et al. Three-dimensional super-resolution morphology by near-field assisted white-light interferometry. Scientific Reports, 6, 24703(2016).

[31] Lei XIN, Xin LIU, Zhongming YANG et al. Three-dimensional reconstruction of super-resolved white-light interferograms based on deep learning. Optics and Lasers in Engineering, 145, 106663(2021).