Tao LIU, Zhibin WANG, Jiaqi HU, Yaonan HE, Weichang JING, Enjing CHEN, Wenlong ZHOU, Guoming YU, Ning YANG, Di ZHAO, Guofeng ZHANG, Shuming YANG. Research on Large Field-of-view White Light Interferometry Measurement System and Performance[J]. Acta Photonica Sinica, 2024, 53(1): 0112003
- Acta Photonica Sinica
- Vol. 53, Issue 1, 0112003 (2024)
Fig. 1. Schematic of the optical path of large field-of-view WLI system
Fig. 2. Measured spectral curve for the white LED source
Fig. 3. Simulated distribution curve of white light interference signal before and after filtering
Fig. 4. Actual raw interference signal for the white LED source at a certain position
Fig. 5. Actual white light interference signal with different spectral filters
Fig. 6. Apparatus of large field-of-view white light interferometer
Fig. 7. Field-of-view at the object side
Fig. 8. Test of the lateral resolution
Fig. 9. Photo of the standard step sample
Fig. 10. Measurement result of the standard step 1
Fig. 11. Measurement result of the standard step 2
Fig. 12. Test of the reticle
Fig. 13. Test of the MEMS structure
Fig. 14. Test of the SiO2 film on a Si wafer
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Table 1. Basic parameters of the customized bandpass filters
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Table 2. Test of the effective lateral magnification
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Table 3. Ten repeated measurement results of the standard step sample
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Table 4. Film thickness measurement results of the central fraction
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