Million-Q integrated Fabry-Perot cavity using ultralow-loss multimode retroreflectors

Hongnan Xu; Yue Qin; Gaolei Hu; Hon Ki Tsang

doi:10.1364/PRJ.470644

[1] M. H. Bitarafan, R. G. DeCorby. On-chip high-finesse Fabry-Perot microcavities for optical sensing and quantum information. Sensors, 17, 1748(2017).

[2] J. Nicholas Porter, J. S. Jackson, D. S. Durfee, R. L. Sandberg. Laser wavelength metrology with low-finesse etalons and Bayer filters. Opt. Express, 28, 37788-37797(2020).

[3] C. Graf, A. Thuring, H. Vahlbruch, K. Danzmann, R. Schnabel. Length sensing and control of a Michelson interferometer with power recycling and twin signal recycling cavities. Opt. Express, 21, 5287-5299(2013).

[4] A. A. Trichet, J. Foster, N. E. Omori, D. James, P. R. Dolan, G. M. Hughes, C. Vallance, J. M. Smith. Open-access optical microcavities for lab-on-a-chip refractive index sensing. Lab Chip, 14, 4244-4249(2014).

[5] Z. Wang, K. Van Gasse, V. Moskalenko, S. Latkowski, E. Bente, B. Kuyken, G. Roelkens. A III-V-on-Si ultra-dense comb laser. Light Sci. Appl., 6, e16260(2017).

[6] T. Kessler, C. Hagemann, C. Grebing, T. Legero, U. Sterr, F. Riehle, M. J. Martin, L. Chen, J. Ye. A sub-40-mHz-linewidth laser based on a silicon single-crystal optical cavity. Nat. Photonics, 6, 687-692(2012).

[7] G. Cui, J. M. Hannigan, R. Loeckenhoff, F. M. Matinaga, M. G. Raymer, S. Bhongale, M. Holland, S. Mosor, S. Chatterjee, H. M. Gibbs, G. Khitrova. A hemispherical, high-solid-angle optical micro-cavity for cavity-QED studies. Opt. Express, 14, 2289-2299(2006).

[8] S. Xie, Y. Zhang, Y. Hu, S. Veilleux, M. Dagenais. On-chip Fabry-Perot Bragg grating cavity enhanced four-wave mixing. ACS Photon., 7, 1009-1015(2020).

[9] S.-P. Yu, H. Jung, T. C. Briles, K. Srinivasan, S. B. Papp. Photonic-crystal-reflector nanoresonators for Kerr-frequency combs. ACS Photon., 6, 2083-2089(2019).

[10] W. Zhang, N. Ehteshami, W. Liu, J. Yao. Silicon-based on-chip electrically tunable sidewall Bragg grating Fabry-Perot filter. Opt. Lett., 40, 3153-3156(2015).

[11] R. Ge, Y. Luo, S. Gao, Y. Han, L. Chen, X. Cai. Reconfigurable silicon bandpass filters based on cascaded Sagnac loop mirrors. Opt. Lett., 46, 580-583(2021).

[12] C. Renaut, J. Dellinger, B. Cluzel, T. Honegger, D. Peyrade, E. Picard, F. De Fornel, E. Hadji. Assembly of microparticles by optical trapping with a photonic crystal nanocavity. Appl. Phy. Lett., 100, 101103(2012).

[13] A. Reiserer, C. Nölleke, S. Ritter, G. Rempe. Ground-state cooling of a single atom at the center of an optical cavity. Phys. Rev. Lett., 110, 223003(2013).

[14] W. Bogaerts, L. Chrostowski. Silicon photonics circuit design: methods, tools and challenges. Laser Photon. Rev., 12, 1700237(2018).

[15] Q. Huang, Q. Liu, J. Xia. Traveling wave-like Fabry-Perot resonator-based add-drop filters. Opt. Lett., 42, 5158-5161(2017).

[16] H. C. Kim, K. Ikeda, Y. Fainman. Resonant waveguide device with vertical gratings. Opt. Lett., 32, 539-541(2007).

[17] H.-C. Kim, K. Ikeda, Y. Fainman. Tunable transmission resonant filter and modulator with vertical gratings. J. Lightwave Technol., 25, 1147-1151(2007).

[18] M. G. Saber, Y. Wang, E. El-Fiky, D. Patel, K. A. Shahriar, M. S. Alam, M. Jacques, Z. Xing, L. Xu, N. Abadia, D. V. Plant. Transversely coupled Fabry-Perot resonators with Bragg grating reflectors. Opt. Lett., 43, 13-16(2018).

[19] Y. Wang, S. Gao, K. Wang, H. Li, E. Skafidas. Ultra-broadband, compact, and high-reflectivity circular Bragg grating mirror based on 220 nm silicon-on-insulator platform. Opt. Express, 25, 6653-6663(2017).

[20] M. W. Pruessner, T. H. Stievater, W. S. Rabinovich. Integrated waveguide Fabry-Perot microcavities with silicon/air Bragg mirrors. Opt. Lett., 32, 533-535(2007).

[21] S. Zamek, L. Feng, M. Khajavikhan, D. T. Tan, M. Ayache, Y. Fainman. Micro-resonator with metallic mirrors coupled to a bus waveguide. Opt. Express, 19, 2417-2425(2011).

[22] Z. J. Yu, H. R. Cui, X. K. Sun. Genetically optimized on-chip wideband ultracompact reflectors and Fabry-Perot cavities. Photon. Res., 5, B15-B19(2017).

[23] Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, S. Noda. A micrometre-scale Raman silicon laser with a microwatt threshold. Nature, 498, 470-474(2013).

[24] S. Jeon, B. S. Song, S. Yamada, Y. Yamaguchi, J. Upham, T. Asano, S. Noda. Multiple-channel wavelength conversions in a photonic crystal cavity. Opt. Express, 23, 4523-4528(2015).

[25] A. D. Osterkryger, J. R. de Lasson, M. Heuck, Y. Yu, J. Mork, N. Gregersen. Spectral symmetry of Fano resonances in a waveguide coupled to a microcavity. Opt. Lett., 41, 2065-2068(2016).

[26] X. C. Ji, J. K. Jang, U. D. Dave, M. Corato-Zanarella, C. Joshi, A. L. Gaeta, M. Lipson. Exploiting ultralow loss multimode waveguides for broadband frequency combs. Laser Photon. Rev., 15, 2000353(2021).

[27] L. Zhang, L. L. Jie, M. Zhang, Y. Wang, Y. W. Xie, Y. C. Shi, D. X. Dai. Ultrahigh-Q silicon racetrack resonators. Photon. Res., 8, 684-689(2020).

[28] M. Soltani, S. Yegnanarayanan, A. Adibi. Ultra-high Q planar silicon microdisk resonators for chip-scale silicon photonics. Opt. Express, 15, 4694-4704(2007).

[29] S. Liu, W. Z. Sun, Y. J. Wang, X. Y. Yu, K. Xu, Y. Z. Huang, S. M. Xiao, Q. H. Song. End-fire injection of light into high-Q silicon microdisks. Optica, 5, 612-616(2018).

[30] S. Gao, Y. Wang, K. Wang, E. Skafidas. High contrast circular grating reflector on silicon-on-insulator platform. Opt. Lett., 41, 520-523(2016).

[31] H. Xu, Y. Shi. Silicon-waveguide-integrated high-quality metagrating supporting bound state in the continuum. Laser Photon. Rev., 14, 1900430(2020).

[32] Y. Wang, S. Gao, K. Wang, E. Skafidas. Ultra-broadband and low-loss 3 dB optical power splitter based on adiabatic tapered silicon waveguides. Opt. Lett., 41, 2053-2056(2016).

[33] D. J. Thomson, Y. Hu, G. T. Reed, J.-M. Fedeli. Low loss MMI couplers for high performance MZI modulators. IEEE Photon. Technol. Lett., 22, 1485-1487(2010).

[34] H. Xu, Y. Shi. Flat-top CWDM (de)multiplexer based on MZI with bent directional couplers. IEEE Photon. Technol. Lett., 30, 169-172(2018).

[35] H. Xu, D. Dai, Y. Shi. Ultra-broadband on-chip multimode power splitter with an arbitrary splitting ratio. OSA Contin., 3, 1212-1221(2020).

[36] Y. Wang, D. Dai. Multimode silicon photonic waveguide corner-bend. Opt. Express, 28, 9062-9071(2020).

[37] M. Born, E. Wolf, A. B. Bhatia. Principles of Optics: Electromagnetic Theory of Propagation, Interference, and Diffraction of Light(2019).

[38] R. C. Weast. CRC Handbook of Chemistry and Physics(1988).

[39] Lumerical Inc.. https://www.lumerical.com/. https://www.lumerical.com/

[40] M. W. Puckett, K. Liu, N. Chauhan, Q. Zhao, N. Jin, H. Cheng, J. Wu, R. O. Behunin, P. T. Rakich, K. D. Nelson, D. J. Blumenthal. 422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth. Nat. Commun., 12, 934(2021).

[41] H. K. Tsang, M. W. K. Mak, L. Y. Chan, J. B. D. Soole, C. Youtsey, I. Adesida. Etched cavity InGaAsP/InP waveguide Fabry-Perot filter tunable by current injection. J. Lightwave Technol., 17, 1890-1895(1999).

[42] D. Dai, J. Wang, Y. Shi. Silicon mode (de)multiplexer enabling high capacity photonic networks-on-chip with a single-wavelength-carrier light. Opt. Lett., 38, 1422-1424(2013).

[43] J. F. Bauters, M. J. Heck, D. John, D. Dai, M. C. Tien, J. S. Barton, A. Leinse, R. G. Heideman, D. J. Blumenthal, J. E. Bowers. Ultra-low-loss high-aspect-ratio Si₃N₄ waveguides. Opt. Express, 19, 3163-3174(2011).

[44] Y. Fu, T. Ye, W. Tang, T. Chu. Efficient adiabatic silicon-on-insulator waveguide taper. Photon. Res., 2, A41-A44(2014).

[45] H. F. Taylor, A. Yariv. Guided wave optics. Proc. IEEE, 62, 1044-1060(1974).

[46] Applied Nanotools. https://www.appliednt.com/. https://www.appliednt.com/

[47] V. R. Almeida, R. R. Panepucci, M. Lipson. Nanotaper for compact mode conversion. Opt. Lett., 28, 1302-1304(2003).

[48] H. Xu, D. Dai, Y. Shi. Fabrication-friendly on-chip silicon polarizer based on polarization-selective corner mirrors. IEEE Photon. Technol. Lett., 33, 652-655(2021).

[49] W. Jin, Q.-F. Yang, L. Chang, B. Shen, H. Wang, M. A. Leal, L. Wu, M. Gao, A. Feshali, M. Paniccia, K. J. Vahala, J. E. Bowers. Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high-Q microresonators. Nat. Photonics, 15, 346-353(2021).

[50] L. Zhang, S. A. Hong, Y. Wang, H. Yan, Y. W. Xie, T. N. Chen, M. Zhang, Z. J. Yu, Y. C. Shi, L. Liu, D. X. Dai. Ultralow-loss silicon photonics beyond the singlemode regime. Laser Photon. Rev., 16, 2100292(2022).

[51] C. M. Greiner, D. Iazikov, T. W. Mossberg. Million-Q reflection-based integrated resonators patterned with deep ultraviolet photolithography. IEEE Photon. Technol. Lett., 18, 2677-2679(2006).

[52] M. H. P. Pfeiffer, A. Kordts, V. Brasch, M. Zervas, M. Geiselmann, J. D. Jost, T. J. Kippenberg. Photonic Damascene process for integrated high-Q microresonator based nonlinear photonics. Optica, 3, 20-25(2016).

[53] D. H. Lee, S. J. Choo, U. Jung, K. W. Lee, K. W. Kim, J. H. Park. Low-loss silicon waveguides with sidewall roughness reduction using a SiO₂ hard mask and fluorine-based dry etching. J. Micromech. Microeng., 25, 015003(2015).