Fan Di. Study on the Polishing Mechanism of Silicon Carbide Optical Surface[J]. Laser & Optoelectronics Progress, 2012, 49(2): 22202
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The polishing mechanism of silicon carbide optical surface still remains untouched. This paper studies the polishing mechanism of silicon carbide optical surface; it also introduces the grinding mechanism of ceramic materialindentation fracture model. The model of silicon carbide polishing in ideal condition is analyzed and the mechanism of silicon carbide polishing in real state is studied.