[1] ZHANG J,TAN K L,GONG H Q.Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems(MEMS)[J].Polymer Testing,2001,20(6):693-701.

[4] RUZZU A,MATTHIS B.Swelling of PMMA-structures in aqueous solutions and room temperature Ni-electroforruing[J].Mcirosystem Technologies,2002,8(2/3):116-119.

[5] LIN C B,WEI M K,LIU C H,et al..Novel fabrication process for high-aspect-ratio and co-axial multi-layer nickel microstructures[C].Proceedings of the IEEE Micro Electro Mechanical Systems(MEMS),2000,584-589.

[7] KLEIN C A.How accurate are Stoneys equation and recent modifications[J].Journal of Applied Physics,2000.88(9):5487-5489.