1School of Integrated Circuits, Peking University, Beijing 100871, China
2National Key Laboratory of Advanced Micro and Nano Manufacture Technology, Beijing 100871, China
3State Key Laboratory of Advanced Optical Communication Systems and Networks, Institute of Quantum Electronics, School of Electronics, Peking University, Beijing 100871, China
4Chengdu Spaceon Electronics Co., Ltd., Chengdu 611731, China
5National Institute of Metrology, Beijing 100029, China