Yuetian Huang, Bin Fan, Shijie Li, Haifeng Liang, Changlong Cai, Weiguo Liu. Error control of diffractive optical element fabricated by single point diamond turning[J]. Infrared and Laser Engineering, 2023, 52(3): 20220504
- Infrared and Laser Engineering
- Vol. 52, Issue 3, 20220504 (2023)
Fig. 1. Schematic diagram of residual area of diffraction structure turning
Fig. 2. Diffraction surface shape
Fig. 3. The actual plane shape of diffraction structure compared with the approximate oblique plane
Fig. 4. Residual area simulation results
Fig. 5. Schematic diagram of residual area width information
Fig. 6. Diffraction element profile detection results
Fig. 7. Measurement results of diffraction structure position error
Fig. 8. Residual area width error detection results
Fig. 9. Measurement results of surface roughness in the center region of diffraction element
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Table 1. Diffraction plane parameters
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Table 2. Tool parameters and machining parameters
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