• Infrared and Laser Engineering
  • Vol. 48, Issue 7, 742003 (2019)
Huang Guojun*, Lu Yimin, Cheng Yong, Tian Fangtao, Mi Chaowei, and Wan Qiang
Author Affiliations
  • [in Chinese]
  • show less
    DOI: 10.3788/irla201948.0742003 Cite this Article
    Huang Guojun, Lu Yimin, Cheng Yong, Tian Fangtao, Mi Chaowei, Wan Qiang. Research on infrared optical properties of SiC films by pulsed laser deposition[J]. Infrared and Laser Engineering, 2019, 48(7): 742003 Copy Citation Text show less

    Abstract

    Non-hydrogen silicon carbide (SiC) films were deposited on germanium substrate by pulsed laser deposition. The effects of laser energy on the microstructure, composition and infrared optical properties of SiC films were investigated. The infrared transmittance spectrums of SiC films were measured by Fourier transform infrared spectroscopy (FTIR). The spectroscopy analysis showed that the characteristic absorption peak of Si-C bonding was found at 785 cm-1, and the SiC films had good transmittance in the range of 4 000-1 300 cm-1. The optical constants of the SiC films were derived by fitting transmittance spectrum curves. It was found that the refractive index and the extinction coefficient of SiC films increased monotonicly with laser energies increasing in the range of 2.5-7.7 μm. The refractive index changed from 2.15 to 2.33 as laser energies increased from 400 mJ to 600 mJ. The extinction coefficient was of the order of 10-3 when laser energies were of 400 mJ and 500 mJ. This study indicates that the SiC film is an excellent optical film material between 2.5 μm to 7.7 μm.
    Huang Guojun, Lu Yimin, Cheng Yong, Tian Fangtao, Mi Chaowei, Wan Qiang. Research on infrared optical properties of SiC films by pulsed laser deposition[J]. Infrared and Laser Engineering, 2019, 48(7): 742003
    Download Citation