Researching on ArF Oscillator Amplifier Excimer Laser

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 17 >Issue 2 >Page 140 > Article

Acta Optica Sinica
Vol. 17, Issue 2, 140 (1997)

Researching on ArF Oscillator Amplifier Excimer Laser

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Researching on ArF Oscillator Amplifier Excimer Laser[J]. Acta Optica Sinica, 1997, 17(2): 140 Copy Citation Text

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Abstract

An ArF oscillator amplifier excimer laser was developted. Using a thyratron as a switch, discharge jitter of the laser system was effectivelly overcome through matching main charge and discharge circuits. It was achieved that amplify index 50 of the system, pulse energy 50 mJ, and a beam divergence lower than 0.20 mrad.

Keywords

amplifier oscillator ArF excimer laser

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