Jingyuan Liang, Xiwen Li, Chenghu Ke, Xizheng Ke. Surface characterization using Zernike polynomials[J]. Opto-Electronic Engineering, 2024, 51(11): 240163-1

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- Opto-Electronic Engineering
- Vol. 51, Issue 11, 240163-1 (2024)

Fig. 1. 3D plots of the first 20 Zernike polynomials

Fig. 2. Wavefront plots of aberrations and their corresponding Zernike polynomials
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Table 1. Comparison of common characterization functions: advantages and disadvantages
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Table 2. Correspondence between the first 9 Zernike polynomials and optical aberrations[5]

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