Zhiyu Zhang. Processes and technologies in fabrication of a large-scale freeform silicon carbide space-borne mirror[J]. Chinese Optics Letters, 2015, 13(Suppl.): S22207
- Chinese Optics Letters
- Vol. 13, Issue Suppl., S22207 (2015)
Fig. 1. (a) Freeform surface model based on a Zernike polynomial; (b) fitted CAD model.
Fig. 2. Spiral center: (a) on the workpiece surface; (b) out of the workpiece surface.
Fig. 3. Schematic of the inclined-axis rotary ultrasonic grinding method.
Fig. 4. Grinding of the freeform SiC mirror: (a) machine tool; (b) testing of shape error; (c) machining results.
Fig. 5. CNC lapping and polishing of the freeform silicon carbide mirror: (a) photo of machine; (b) convergence rate of surface error with lapping cycles.
Fig. 6. (a) Testing optical path; (b) region function distribution of CGH; (c) photo of CGH; (d) testing results.
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