13.5 nm Schwarzschild microscope with high magnification and high resolution

Shenghao Chen; Xin Wang; Qiushi Huang; Shuang Ma; Zhanshan Wang

doi:10.3788/COL201715.043401

Journals >Chinese Optics Letters >Volume 15 >Issue 4 >Page 043401 > Article

Chinese Optics Letters
Vol. 15, Issue 4, 043401 (2017)

13.5 nm Schwarzschild microscope with high magnification and high resolution

Shenghao Chen, Xin Wang, Qiushi Huang, Shuang Ma, and Zhanshan Wang^*

Author Affiliations

Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

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DOI: 10.3788/COL201715.043401 Cite this Article Set citation alerts

Shenghao Chen, Xin Wang, Qiushi Huang, Shuang Ma, Zhanshan Wang. 13.5 nm Schwarzschild microscope with high magnification and high resolution[J]. Chinese Optics Letters, 2017, 15(4): 043401 Copy Citation Text

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Abstract

A Schwarzschild microscope with a numerical aperture of 0.2 and a magnification of 130 in a 100 μm field of view (FOV) is designed and is working at 13.5 nm. Meanwhile, a CCD is used as a detector with a pixel size of

13 μm \times 13 μm

and imaging area of

13 mm \times 13 mm

. The imaging quality with tolerances of system and errors of mirrors are considered. We obtain that the best on-axes object resolution can be up to about 200 nm, the average value is 230 nm, and the resolution is about 360 nm at 80 μm FOV.

R_{1} = \frac{2}{M + M_{2}},

(1)

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R_{2} = \frac{2 a}{M_{2} + 1},

(2)

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M_{2} = \frac{(1 + M) - {(5 + 6 M + 5 M^{2})}^{1 / 2}}{2},

(3)

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a = \frac{(M^{2} - M_{2}^{2}) (M - M_{2})}{(1 - M_{2}^{2}) (1 - M_{2})},

(4)

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M = 13 μm / 100 nm = 130 .

(5)

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f = 1 / δ / M \approx 39 lp / mm .

(6)

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NA = \frac{H_{1} / 2}{L_{1}} .

(7)

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FOV = 13 mm / M = 100 μm .

(8)

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δ_{system} = 1 / f_{system} / M \approx 100 nm .

(9)

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δ = δ_{system} + [{(δ_{figure} - δ_{system})}^{2} + {(δ_{eccentricity} - δ_{system})}^{2} {+ (δ_{position} - δ_{system})]}^{1 / 2} = 124 nm .

(10)

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Shenghao Chen, Xin Wang, Qiushi Huang, Shuang Ma, Zhanshan Wang. 13.5 nm Schwarzschild microscope with high magnification and high resolution[J]. Chinese Optics Letters, 2017, 15(4): 043401

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