Control techniques based on referenced defocus amount

[in Chinese]

Journals >Opto-Electronic Engineering >Volume 31 >Issue 1 >Page 43 > Article

Opto-Electronic Engineering
Vol. 31, Issue 1, 43 (2004)

Control techniques based on referenced defocus amount

[in Chinese]

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[in Chinese]

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[in Chinese]. Control techniques based on referenced defocus amount[J]. Opto-Electronic Engineering, 2004, 31(1): 43 Copy Citation Text

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References

[1] UDUPA G,SINGAPERUMAL M,SIROHI R S, et al. Characterization of surface topography by confocal microscopy. I. Principles and the measurement system [J]. Meas. Sci. Technol,2000, 11(3): 305-314.

[2] GOLTSOS W,LIU S.Polar coordinate laser writer for binary optics fabrication [J]. SPIE,1990, 1211: 137-147.

[3] COHEN D K,GEE W H,LUDEKE M,et al. Automatic focus control: the astigmatic lens approach [J]. Appl. Opt,1984, 23(4): 565-570.

[in Chinese]. Control techniques based on referenced defocus amount[J]. Opto-Electronic Engineering, 2004, 31(1): 43

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