Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution

Chen-Tai Tan; Yuan-Sheng Chan; Jhao-An Chen; Teh-Chao Liao; Ming-Hung Chiu

doi:10.3788/col201109.101202

Journals >Chinese Optics Letters >Volume 9 >Issue 10 >Page 101202 > Article

Chinese Optics Letters
Vol. 9, Issue 10, 101202 (2011)

Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution

Chen-Tai Tan, Yuan-Sheng Chan, Jhao-An Chen, Teh-Chao Liao, and Ming-Hung Chiu

Author Affiliations

Department of Electro-Optical Engineering, National Formosa University, No. 64, Wunhua Road, Huwei, Yunlin 632, China

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DOI: 10.3788/col201109.101202 Cite this Article Set citation alerts

Chen-Tai Tan, Yuan-Sheng Chan, Jhao-An Chen, Teh-Chao Liao, Ming-Hung Chiu. Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution[J]. Chinese Optics Letters, 2011, 9(10): 101202 Copy Citation Text

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