Zhiyao Ma, Lei Chen, Donghui Zheng, Haiying Ma, Ruokun Li, Chen Huang, Chenhui Hu. System error calibration for Φ300 mm vertical Fizeau interferometer based on liquid reference[J]. Infrared and Laser Engineering, 2022, 51(2): 20210880
- Infrared and Laser Engineering
- Vol. 51, Issue 2, 20210880 (2022)
Fig. 1. Natural state vector height of liquid
Fig. 2. (a) Schematic diagram of Φ 300 mm Fizeau interferometer; (b) Φ 300 mm Fizeau interferometer
Fig. 3. Ring point support structure
Fig. 4. (a) 10 cs silicone oil measurement result; (b) 100 cs silicone oil measurement result; (c) 1000 cs silicone oil measurement result
Fig. 5. (a) 2.0 mm measurement result; (b) 2.2 mm measurement result; (c) 2.4 mm measurement result; (d) 2.6 mm measurement result; (e) 2.8 mm measurement result; (f) 3.0 mm measurement result
Fig. 6. Repeatability of measurement results for different liquid thickness
Fig. 7. (a) 1.5 mm measurement result; (b) 1.8 mm measurement result
Fig. 8. (a) 350 mm cavity length measurement result; (b) 500 mm cavity length measurement result
Fig. 9. (a) 20.0 ℃ measurement result; (b) 20.1 ℃ measurement result
Fig. 10. (a) Temperature monitoring device; (b) Relationship between PV, RMS values and temperature
Fig. 11. (a) Φ 400 mm liquid reference plane; (b) Reference flat crystal calibration process
Fig. 12. System error measured by Φ 400 mm liquid reference plane
Fig. 13. (a) Φ 450 mm liquid reference plane; (b) System error measured by Φ 450 mm liquid reference plane
Fig. 14. System error measurement repeatability
Fig. 15. Residual wavefront
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