Vanadium oxide films (V₂O₅) are deposited on the substrates of infrared quartz, sapphire and singlecrystal diamond respectively by radio freguency (RF) reactive magnetron sputtering. The structure, thickness, surface morphology, electrical and optical performances of the films are studied. The results indicate that all the deposited films are polycrystalline V2O5 films with preferred orientation along (001) plane. The crystallization behavior and the surface topography are the best when the substrate is single-crystal diamond, the phase-transition temperature and the temperature range are the lowest simultaneously. In terms of the optical performance, the optical-shutting time of the films on sapphire and diamond is less than 2.5 ms and the recovery time is about 30 ms . The prominent optical-mutation property is presented on the single-crystal diamond, with the transmittance ratio before and after the phase transition of 10.3.