[1] Armand Neukermans, Rajiv Ramaswami. MEMS technology for optical networking applications. IEEE, Communications Magazine, 2001 :62~69
[2] Lin L Y, Goldstein E L, Tkach R W. Free-space micromachined optical switches for optical networking. IEEE J. Selected Topics in Quantum Electronics, 1999, 5(1):4~9
[3] Lee Shi-Sheng, Huang Long-Sun, Kim Chang-Jin et al.. Free-space fiber-optic switches based on MEMS vertical torsion mirrors. J. Lightwave Technol., 1999, 17(1):7~13
[4] Yasseen A A, Mitchell J N, Klemic J F et al.. A rotary electrostatic micromotor 1×8 optical switch. IEEE J. Selected Topics in Quantum Electronics, 1999, 5(1):26~32
[8] Gianchandani A Y B. Batch mode micro-electro-discharge matching. J. Microelectromech. Syst., 2002, 11(2):102~110