Vacuum performance of Ti-Zr-V getter films deposited on narrow tubes

Bangle Zhu; Le Fan; Yuanzhi Hong; Sihui Wang; Wei Wei; Yigang Wang; Jianwei Fang; Yong Wang

doi:10.11884/HPLPB202234.210478

[1] Sun Zhenbo, Shang Lei, Shang Fenglei, et al. Simulation study of longitudinal injection scheme for HALS with a higher harmonic cavity system[J]. Nuclear Science and Techniques, 30, 113(2019).

[3] Benvenuti C, Chiggiato P, Cicoira F, et al. Decreasing surface outgassing by thin film getter coatings[J]. Vacuum, 50, 57-63(1998).

[4] Benvenuti C, Chiggiato P, Cicoira F, et al. Nonevaporable getter films for ultrahigh vacuum applications[J]. Journal of Vacuum Science & Technology A, 16, 148-154(1998).

[5] Jimenez J M. LHC: the world's largest vacuum systems being operated at CERN[J]. Vacuum, 84, 2-7(2009).

[6] AlDmour E, Grabski M J. The vacuum system of MAX IV stage rings: installation conditioning[C]Proceedings of the 8th International Particle Accelerat Conference. Copenhagen, Denmark, 2017: 34683470.

[7] Hahn M. Operational experience and relation to deposition process for NEG-coated chambers installed on the ESRF electron storage ring[J]. Vacuum, 81, 759-761(2007).

[8] Malyshev O B, Cox M P. Design modelling and measured performance of the vacuum system of the diamond light source storage ring[J]. Vacuum, 86, 1692-1696(2012).

[9] Li C C, Huang J L, Lin R J, et al. Activation characterization of non-evaporable Ti–Zr–V getter films by synchrotron radiation photoemission spectroscopy[J]. Thin Solid Films, 517, 5876-5880(2009).

[10] Ge Xiaoqin, Wang Yigang, Shao Jieqiong, et al. Testing the activation temperature of non-evaporable Ti-Zr-Hf-V getter films by XPS[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 967, 163864(2020).

[11] Prodromides A E, Scheuerlein C, Taborelli M. Lowering the activation temperature of TiZrV non-evaporable getter films[J]. Vacuum, 60, 35-41(2001).

[12] Benvenuti C, Chiggiato P, Mongelluzzo A, et al. Influence of the elemental composition and crystal structure on the vacuum properties of Ti-Zr-V nonevaporable getter films[J]. Journal of Vacuum Science & Technology A, 19, 2925-2930(2001).

[13] Malyshev O B, Valizadeh R, Colligon J S, et al. Influence of deposition pressure and pulsed dc sputtering on pumping properties of Ti–Zr–V nonevaporable getter films[J]. Journal of Vacuum Science & Technology A, 27, 521-530(2009).

[14] Malyshev O B, Middleman K J, Colligon J S, et al. Activation and measurement of nonevaporable getter films[J]. Journal of Vacuum Science & Technology A, 27, 321-327(2009).

[15] Malyshev O B, Middleman K J. Test particle monte-Carlo modelling of installations for NEG film pumping properties evaluation[J]. Vacuum, 83, 976-979(2009).