Bangle Zhu, Le Fan, Yuanzhi Hong, Sihui Wang, Wei Wei, Yigang Wang, Jianwei Fang, Yong Wang. Vacuum performance of Ti-Zr-V getter films deposited on narrow tubes[J]. High Power Laser and Particle Beams, 2022, 34(6): 064005
- High Power Laser and Particle Beams
- Vol. 34, Issue 6, 064005 (2022)
Fig. 1. Schematic diagram of DC magnetron sputtering coating system
Fig. 2. Schematic diagram of ultimate vacuum test system
Fig. 3. System diagram of the vacuum system for analyzing vacuum properties of the tubular NEG tube
Fig. 4. SEM surface (a), cross-sectional (b) and (c) EDS mapping images of Ti-Zr-V films
Fig. 5. XPS full spectrum of prepared Ti-Zr-V NEG films
Fig. 6. Initial CO sticking probability and CO pumping capacity as a function of activation temperature
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Table 1. Coating parameters
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Table 2. Results of ultimate vacuum measurement
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