• Chinese Optics Letters
  • Vol. 18, Issue 1, 012501 (2020)
Dan Yang, Yongqing Huang*, Tao Liu, Xiaokai Ma, Xiaofeng Duan, Kai Liu, and Xiaomin Ren
Author Affiliations
  • Institute of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
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    DOI: 10.3788/COL202018.012501 Cite this Article Set citation alerts
    Dan Yang, Yongqing Huang, Tao Liu, Xiaokai Ma, Xiaofeng Duan, Kai Liu, Xiaomin Ren. Bias-free operational monolithic symmetric-connected photodiode array[J]. Chinese Optics Letters, 2020, 18(1): 012501 Copy Citation Text show less
    (a) Capacitance-voltage characteristics of the UTC-PD with different doping concentrations in the collection layer. (b) The electric field distribution of the UTC-PD with the different doping concentrations in the collection layer under zero bias.
    Fig. 1. (a) Capacitance-voltage characteristics of the UTC-PD with different doping concentrations in the collection layer. (b) The electric field distribution of the UTC-PD with the different doping concentrations in the collection layer under zero bias.
    Schematic experiment setup of the (a) frequency response and (b) RF output power. The inserted figure is the micrograph of the fabricated SC-PDA with 15 μm diameter of each PD.
    Fig. 2. Schematic experiment setup of the (a) frequency response and (b) RF output power. The inserted figure is the micrograph of the fabricated SC-PDA with 15 μm diameter of each PD.
    (a) Measured dark current of the SC-PDA versus the PD diameter. (b) Measured DC response of the fabricated SC-PDA, the SC-PDA in Ref. [12], and the corresponding single PD element. The data were measured with 1550 nm incident light without bias.
    Fig. 3. (a) Measured dark current of the SC-PDA versus the PD diameter. (b) Measured DC response of the fabricated SC-PDA, the SC-PDA in Ref. [12], and the corresponding single PD element. The data were measured with 1550 nm incident light without bias.
    Measured frequency response of the fabricated SC-PDA with the 15 μm diameter PD elements at 500 μA photocurrent.
    Fig. 4. Measured frequency response of the fabricated SC-PDA with the 15 μm diameter PD elements at 500 μA photocurrent.
    Measured 3 dB bandwidth versus different diameters of the PD elements under zero bias at 1 mA photocurrent.
    Fig. 5. Measured 3 dB bandwidth versus different diameters of the PD elements under zero bias at 1 mA photocurrent.
    Measured capacitance of the fabricated SC-PDA and the corresponding single PD element with different diameters without bias at 1 mA photocurrent. The inserted figure is the capacitance versus different diameter of the PD when the RF frequency is 10 GHz.
    Fig. 6. Measured capacitance of the fabricated SC-PDA and the corresponding single PD element with different diameters without bias at 1 mA photocurrent. The inserted figure is the capacitance versus different diameter of the PD when the RF frequency is 10 GHz.
    Measured small signal frequency response of the SC-PDA and PD elements with a diameter of 50 μm at 0 V bias and a photocurrent of 2 mA.
    Fig. 7. Measured small signal frequency response of the SC-PDA and PD elements with a diameter of 50 μm at 0 V bias and a photocurrent of 2 mA.
    (a) Measured RF output power versus photocurrent of different-diameter SC-PDA under zero bias. (b) Measured RF output power versus photocurrent of 50 μm diameter SC-PDA under different reverse bias voltage.
    Fig. 8. (a) Measured RF output power versus photocurrent of different-diameter SC-PDA under zero bias. (b) Measured RF output power versus photocurrent of 50 μm diameter SC-PDA under different reverse bias voltage.
    MaterialDoping (cm−3)Thickness (nm)Layer
    PIn0.53Ga0.47As2×101950P-contact layer
    PIn0.77Ga0.23As0.499P0.5011×101920Blocking layer
    PIn0.53Ga0.47AsGraded-doped220Absorber
    PIn0.53Ga0.47As1.5×101810Spacer1
    NIn0.77Ga0.23As0.499P0.5011×101512Spacer2
    N-InP1.5×101810Spacer3
    I-InP<1×1015350Collector
    N-InP1×101750Sub-collector
    NIn0.77Ga0.23As0.499P0.5011×101815Etch stop layer
    N-InP>1×1019500N-contact layer
    Table 1. Epitaxial Structure of the UTC-PD
    Dan Yang, Yongqing Huang, Tao Liu, Xiaokai Ma, Xiaofeng Duan, Kai Liu, Xiaomin Ren. Bias-free operational monolithic symmetric-connected photodiode array[J]. Chinese Optics Letters, 2020, 18(1): 012501
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