Silicon heterojunction (SHJ) solar cells as a new high efficient solar cell have been paid much more attention in the past years is prepared by hydrogenated amorphous silicon films deposited on crystalline silicon. The textured structure in high efficiency heterojunction solar cells reduces the reflection and improves the light trapping. As a result, there is a subsequent higher short circuit current density in the solar cells. Wet chemical etching process is used to obtain texture on monocrystalline silicon substrate. Several key parameters which influence texturing processes, including concentration of isopropyl alcohol, etching time, substrate type and the content of sodium silicate, are selected to optimize and achieve the low reflection on silicon substrate. After that, the reflectance reduces from 34.7% to 9.14% (1011 nm) and the short circuit current density enhances from 32.06 mA/cm- 2 to 36.16 mA/cm- 2. The textured substrate can effectively improve the performance of SHJ solar cells.