Zhao Keqiang, Xie Fang, Ma Sen, Wang Yunzhi, Chen Liang. Research on a Wavenumber Resolved Low Coherence Interferometry for Step Height Measurement[J]. Acta Optica Sinica, 2015, 35(11): 1112006
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Zhao Keqiang, Xie Fang, Ma Sen, Wang Yunzhi, Chen Liang. Research on a Wavenumber Resolved Low Coherence Interferometry for Step Height Measurement[J]. Acta Optica Sinica, 2015, 35(11): 1112006