The technical problems concerning the parameter measurement of the laser beam by using a CCD array is studied. A high-precision system for laser beam parameter measurement is developed. Its aberrations and optical interferences are analyzed in theory, and the laser beam with fundamental Gaussian mode by continuous a LD-pumped, solid-state mode generator with 1064 nm is measured. The influence of the beam output with different interference patterns on measurement precision is analyzed and compared with theoretical estimation. Then, the technical requests for designing the optical system are brought up, which provides reference for developing the similar instrument.