Xingye Zhou, Yuanjie Lü, Hongyu Guo, Xubo Song, Yuangang Wang, Shixiong Liang, Aimin Bu, Zhihong Feng. High-stability 4H-SiC avalanche photodiodes for UV detection at high temperatures[J]. Chinese Optics Letters, 2023, 21(3): 032502
- Chinese Optics Letters
- Vol. 21, Issue 3, 032502 (2023)
Fig. 1. Device structure of 4H-SiC APDs. (a) Schematic cross-sectional structure; (b) doping concentration profile of epilayers obtained by SIMS.
Fig. 2. Characteristics of 4H-SiC APDs at room temperature. (a) I-V and I-M curves; (b) spectral responsivity. Here, the photo image of the fabricated 4H-SiC APD is shown in the inset of Fig. 2(a).
Fig. 3. Performance of 4H-SiC APDs at different temperatures. (a) Dark currents near the breakdown voltage; (b) breakdown voltage shift as a function of temperature.
Fig. 4. Two-dimensional mapping of the junction temperature for 4H-SiC APDs with different maximum junction temperatures. (a) 145°C; (b) 270°C.
Fig. 5. Dark current of 4H-SiC APD as a function of aging time with different stress conditions. (a) 175°C/100 µA; (b) 200°C/100 µA; (c) 200°C/500 µA.
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Table 1. Comparison of Different 4H-SiC APDs
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